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銆�銆�1. MOSFET鐨勮嚚鐣岄浕澹擄紙threshold voltage锛変富瑕佺敱鏌垫サ鑸囬�氶亾鏉愭枡鐨勫姛鍑芥暩(sh霉)锛坵ork function锛変箣闁撶殑宸暟渚嗘焙瀹氾紝鑰屽洜?y脿n)妲庡棏效鐠炰妇|(zh矛)涓婃槸鍗婂皫(d菐o)楂�锛屾墍浠ュ彲浠ヨ棄鐢辨懟闆滀笉鍚屾サ鎬х殑闆滆唱(zh矛)渚嗘敼璁婂叾鍔熷嚱鏁�(sh霉)銆傛洿閲嶈鐨勬槸锛屽洜?y脿n)妲庡棏效闊伔绱鸡槌涙━菛璧栧鏌氼噣g鑳介殭锛坆andgap锛夌浉鍚岋紝鍥犳鍦ㄩ檷浣嶱MOS鎴栨槸NMOS鐨勮嚚鐣岄浕澹撴檪(sh铆)鍙互钘夌敱鐩存帴瑾�(di脿o)鏁村鏅剁鐨勫姛鍑芥暩(sh霉)渚嗛仈(d谩)鎴愰渶姹�銆傚弽閬庝締瑾紝閲戝爆鏉愭枡鐨勫姛鍑芥暩(sh霉)骞朵笉鍍忓崐灏�(d菐o)楂旈偅涔堟槗浜庢敼璁�锛屽姝や竴渚嗚闄嶄綆MOSFET鐨勮嚚鐣岄浕澹撳氨璁婂緱姣旇純鍥伴洠銆傝�屼笖濡傛灉鎯宠鍚屾檪(sh铆)闄嶄綆PMOS鍜孨MOS鐨勮嚚鐣岄浕澹�锛屽皣闇�瑕佸叐绋笉鍚岀殑閲戝爆鍒嗗垾鍋氬叾鏌垫サ鏉愭枡锛屽皪(du矛)浜庡埗绋嬪張鏄竴鍊�(g猫)寰堝ぇ鐨勮畩閲�銆�
銆�銆�2. 纭呪�斾簩姘у寲纭呮帴闈㈢稉(j墨ng)閬庡骞寸殑鐮旂┒锛屽凡缍�(j墨ng)璀夊(sh铆)閫欏叐绋潗鏂欎箣闁撶殑缂洪櫡锛坉efect锛夋槸鐩稿皪(du矛)鑰岃█姣旇純灏戠殑銆傚弽涔嬶紝閲戝爆鈥旂禃绶ｉ珨鎺ラ潰鐨勭己闄峰锛屽鏄撳湪鍏╄�呬箣闁撳舰鎴愬緢澶氳〃闈㈣兘闅�锛屽ぇ鐐哄奖闊垮厓浠剁殑鐗规��銆�
銆�銆�3. 澶氭櫠纭呯殑铻嶉粸(di菐n)姣斿ぇ澶氭暩(sh霉)鐨勯噾灞珮锛岃�屽湪鐝�(xi脿n)浠ｇ殑鍗婂皫(d菐o)楂斿埗绋嬩腑缈�(x铆)鎱ｅ湪楂樻韩涓嬫矇绌嶆煹妤垫潗鏂欎互澧為��(j矛n)鍏冧欢鏁堣兘銆傞噾灞殑铻嶉粸(di菐n)浣�锛屽皣鏈�(hu矛)褰遍熆鍒剁▼鎵�鑳戒娇鐢ㄧ殑婧害涓婇檺銆�
銆�銆�涓嶉亷澶氭櫠纭呴洊鐒跺湪閬庡幓浜屽崄骞存槸鍒堕�燤OSFET鏌垫サ鐨勬(bi膩o)婧�(zh菙n)锛屼絾涔熸湁鑻ュ共缂洪粸(di菐n)浣垮緱鏈締浠嶇劧鏈夐儴浠組OSFET鍙兘浣跨敤閲戝爆鏌垫サ锛岄�欎簺缂洪粸(di菐n)濡備笅锛�
銆�銆�1. 澶氭櫠纭呭皫(d菐o)闆绘�т笉濡傞噾灞紝闄愬埗浜嗚▕铏�(h脿o)鍌抽仦鐨勯�熷害銆傞洊鐒跺彲浠ュ埄鐢ㄦ懟闆滅殑鏂瑰紡鏀瑰杽鍏跺皫(d菐o)闆绘�э紝浣嗘垚鏁堜粛鐒舵湁闄�銆傜洰鍓嶆湁浜涜瀺榛�(di菐n)姣旇純楂樼殑閲戝爆鏉愭枡濡傦細閹紙Tungsten锛�銆侀垿锛圱itanium锛�銆侀埛锛圕obalt锛夋垨鏄幊锛圢ickel锛夎鐢ㄤ締鍜屽鏅剁鍒舵垚鍚堥噾銆傞�欓娣峰悎鏉愭枡閫氬父绋辩偤閲戝爆纭呭寲鐗╋紙silicide锛夈�傚姞涓婁簡閲戝爆纭呭寲鐗╃殑澶氭櫠纭呮煹妤垫湁钁楁瘮杓冨ソ鐨勫皫(d菐o)闆荤壒鎬э紝鑰屼笖鍙堣兘澶犺�愬彈楂樻韩鍒剁▼銆傛澶栧洜?y脿n)姒婚淇熸潓顖冮攺濂堟仮妾獌璺傝墵O琛ㄩ潰锛岄洟閫氶亾鍗�(q奴)杓冮仩(yu菐n)锛屾墍浠ヤ篃涓嶆渻(hu矛)灏�(du矛)MOSFET鐨勮嚚鐣岄浕澹撻�犳垚澶ぇ褰遍熆銆�
銆�銆�鍦ㄦ煹妤�銆佹簮妤佃垏婕忔サ閮介崓涓婇噾灞鍖栫墿鐨勫埗绋嬬ū鐐衡�滆嚜鎴戝皪(du矛)婧�(zh菙n)閲戝爆纭呭寲鐗╁埗绋嬧�濓紙Self-Aligned Silicide锛�锛岄�氬父绨�(ji菐n)绋眘alicide鍒剁▼銆�
銆�銆�2. 鐣�(d膩ng)MOSFET鐨勫昂瀵哥府鐨勯潪甯稿皬銆佹煹妤垫哀鍖栧堡涔熻畩寰楅潪甯歌杽鏅�(sh铆)锛屼緥濡傜従(xi脿n)鍦ㄧ殑鍒剁▼鍙互鎶婃哀鍖栧堡绺埌涓�绱嶇背宸﹀彸鐨勫帤搴︼紝涓�绋亷鍘绘矑鏈夌櫦(f膩)鐝�(xi脿n)鐨勭従(xi脿n)璞′篃闅ㄤ箣鐢�(ch菐n)鐢�锛岄�欑ó鐝�(xi脿n)璞＄ū鐐衡�滃鏅剁绌轰箯鈥�銆傜暥(d膩ng)MOSFET鐨勫弽杞�(zhu菐n)灞ゅ舰鎴愭檪(sh铆)锛屾湁澶氭櫠纭呯┖涔忕従(xi脿n)璞＄殑MOSFET鏌垫サ澶氭櫠纭呴潬杩戞哀鍖栧堡铏�锛屾渻(hu矛)鍑虹従(xi脿n)涓�鍊�(g猫)绌轰箯灞わ紙depletion layer锛�锛屽奖闊縈OSFET灏�(d菐o)閫氱殑鐗规�с�傝瑙ｆ焙閫欑ó鍟忛锛岄噾灞煹妤垫槸鐨勬柟妗�銆傜洰鍓嶅彲琛岀殑鏉愭枡鍖呮嫭閴紙Tantalum锛夈�侀帰銆佹爱鍖栭壄锛圱antalum Nitride锛夛紝鎴栨槸姘寲閳︼紙Titalium Nitride锛夈�傞�欎簺閲戝爆鏌垫サ閫氬父鍜岄珮浠嬮浕甯告暩(sh霉)鐗╄唱(zh矛)褰㈡垚鐨勬哀鍖栧堡涓�璧锋(g貌u)鎴怣OS闆诲銆傚彟澶栦竴绋В姹烘柟妗堟槸灏囧鏅剁瀹屽叏鐨勫悎閲戝寲锛岀ū鐐篎USI锛團Ully-SIlicide polysilicon gate锛夊埗绋�銆�
銆�銆�鍚勭ó甯歌鐨凪OSFET鎶�琛�(sh霉)
銆�銆�闆欐煹妤礛OSFET
銆�銆�闆欐煹妤碉紙dual-gate锛塎OSFET閫氬父鐢ㄥ湪灏勯牷锛圧adio Frequency, RF锛夌⿳楂旈浕璺腑锛岄�欑óMOSFET鐨勫叐鍊�(g猫)鏌垫サ閮藉彲浠ユ帶鍒堕浕娴佸ぇ灏�銆傚湪灏勯牷闆昏矾鐨勬噳(y墨ng)鐢ㄤ笂锛岄洐鏌垫サMOSFET鐨勭浜屽��(g猫)鏌垫サ澶у鏁�(sh霉)鐢ㄤ締鍋氬鐩�銆佹贩闋诲櫒鎴栨槸闋荤巼杞�(zhu菐n)鎻涚殑鎺у埗銆�
銆�銆�绌轰箯寮廙OSFET
銆�銆�涓�鑸�岃█锛岀┖涔忓紡锛坉epletion mode锛塎OSFET姣斿墠杩扮殑鍔犲挤(qi谩ng)寮忥紙enhancement mode锛塎OSFET灏戣?锛熻緱魏绲凮SFET鍦ㄥ埗閫犻亷绋嬩腑鏀硅畩鎽婚洔鍒伴�氶亾鐨勯洔璩�(zh矛)婵冨害锛屼娇寰楅�欑óMOSFET鐨勬煹妤靛氨绠楁矑鏈夊姞闆诲锛岄�氶亾浠嶇劧瀛樺湪銆傚鏋滄兂瑕侀棞(gu膩n)闁夐�氶亾锛屽墖蹇呴爤鍦ㄦ煹妤垫柦鍔犺矤(f霉)闆诲?锛熻緱魏绲凮SFET鐨勬噳(y墨ng)鐢ㄦ槸鍦ㄢ�滃父闂�(gu膩n)鍨嬧�濓紙normally-off锛夌殑闁嬮棞(gu膩n)锛岃�岀浉灏�(du矛)鐨�锛屽姞寮�(qi谩ng)寮廙OSFET鍓囩敤鍦ㄢ�滃父闁嬪瀷鈥濓紙normally-on锛夌殑闁嬮棞(gu膩n)涓�銆�
銆�銆�NMOS閭忚集
銆�銆�鍚屾ǎ椹�(q奴)鍕�(d貌ng)鑳藉姏鐨凬MOS閫氬父姣擯MOS鎵�鍗犵敤鐨勯潰绌嶅皬锛屽洜姝ゅ鏋滃彧鍦ㄩ倧杓杸鐨勮ō(sh猫)瑷�(j矛)涓婁娇鐢∟MOS鐨勮┍涔熻兘绺皬鑺墖闈㈢⿳銆備笉閬嶯MOS閭忚集闆栫劧鍗犵殑闈㈢⿳灏�锛屽嵒鐒℃硶鍍廋MOS閭忚集涓�妯ｅ仛鍒颁笉娑堣�楅潨鎱�(t脿i)鍔熺巼锛屽洜姝ゅ湪1980骞翠唬涓湡鍚庡凡缍�(j墨ng)婕告几閫�鍑哄競鍫�(ch菐ng)銆�
銆�銆�鍔熺巼MOSFET
銆�銆�鍔熺巼鏅堕珨绠″柈鍏冪殑鎴潰鍦�銆傞�氬父涓�鍊�(g猫)甯傚敭鐨勫姛鐜囨櫠楂旂閮藉寘鍚簡鏁�(sh霉)鍗冨��(g猫)閫欐ǎ鐨勫柈鍏�銆備富姊濈洰锛氬姛鐜囨櫠楂旂
銆�銆�鍔熺巼MOSFET鍜屽墠杩扮殑MOSFET鍏冧欢鍦ㄧ祼(ji茅)妲�(g貌u)涓婂氨鏈夎憲椤憲鐨勫樊鐣�銆備竴鑸⿳楂旈浕璺噷鐨凪OSFET閮芥槸骞抽潰寮忥紙planar锛夌殑绲�(ji茅)妲�(g貌u)锛屾櫠楂旂鍏�(n猫i)鐨勫悇绔粸(di菐n)閮介洟鑺墖琛ㄩ潰鍙湁骞惧��(g猫)寰背鐨勮窛闆�銆傝�屾墍鏈夌殑鍔熺巼鍏冧欢閮芥槸鍨傜洿寮忥紙vertical锛夌殑绲�(ji茅)妲�(g貌u)锛岃畵鍏冧欢鍙互鍚屾檪(sh铆)鎵垮彈楂橀浕澹撹垏楂橀浕娴佺殑宸ヤ綔鐠�(hu谩n)澧�銆備竴鍊�(g猫)鍔熺巼MOSFET鑳借�愬彈鐨勯浕澹撴槸闆滆唱(zh矛)鎽婚洔婵冨害鑸噉-type纾婃櫠灞わ紙epitaxial layer锛夊帤搴︾殑鍑芥暩(sh霉)锛岃�岃兘閫氶亷鐨勯浕娴佸墖鍜屽厓浠剁殑閫氶亾瀵害鏈夐棞(gu膩n)锛岄�氶亾瓒婂鍓囪兘瀹圭磵瓒婂闆绘祦銆傚皪(du矛)浜庝竴鍊�(g猫)骞抽潰绲�(ji茅)妲�(g貌u)鐨凪OSFET鑰岃█锛岃兘鎵垮彈鐨勯浕娴佷互鍙婂穿娼伴浕澹撶殑澶氬閮藉拰鍏堕�氶亾鐨勯暦(zh菐ng)瀵ぇ灏忔湁闂�(gu膩n)銆傚皪(du矛)鍨傜洿绲�(ji茅)妲�(g貌u)鐨凪OSFET渚嗚锛屽厓浠剁殑闈㈢⿳鍜屽叾鑳藉绱嶇殑闆绘祦鎴愬ぇ绱勬垚姝ｆ瘮锛岀鏅跺堡鍘氬害鍓囧拰鍏跺穿娼伴浕澹撴垚姝ｆ瘮銆�
銆�銆�鍊煎緱涓�鎻愮殑鏄噰鐢ㄥ钩闈㈠紡绲�(ji茅)妲�(g貌u)鐨勫姛鐜嘙OSFET涔熷苟闈炰笉瀛樺湪锛岄�欓鍏冧欢涓昏鐢ㄥ湪鐨勯煶闊挎斁澶у櫒涓�傚钩闈㈠紡鐨勫姛鐜嘙OSFET鍦ㄩ＝鍜屽崁(q奴)鐨勭壒鎬ф瘮鍨傜洿绲�(ji茅)妲�(g貌u)鐨勫皪(du矛)鎵嬫洿濂�銆傚瀭鐩村紡鍔熺巼MOSFET鍓囧鍗婄敤渚嗗仛闁嬮棞(gu膩n)鍒囨彌涔嬬敤锛屽彇鍏跺皫(d菐o)閫氶浕闃伙紙turn-on resistance锛夐潪甯稿皬鐨勫劒(y艒u)榛�(di菐n)銆�
銆�銆�DMOS
銆�銆�DMOS鏄洐閲�?c谩i)U(ku貌)鏁OSFET锛坉ouble-Diffused MOSFET锛夌殑绺锛屽畠涓昏鐢ㄤ簬楂樺锛屽爆浜庨珮澹揗OS绠¤寖鐤�銆�
銆�銆�浠OSFET瀵�(sh铆)鐝�(xi脿n)椤炴瘮闁嬮棞(gu膩n)
銆�銆�MOSFET鍦ㄥ皫(d菐o)閫氭檪(sh铆)鐨勯�氶亾闆婚樆浣�锛岃�屾埅姝㈡檪(sh铆)鐨勯浕闃昏繎涔庣劇闄愬ぇ锛屾墍浠ラ仼鍚堜綔鐐洪姣旇▕铏�(h脿o)鐨勯枊闂�(gu膩n)锛堣▕铏�(h脿o)鐨勮兘閲忎笉鏈�(hu矛)鍥�?y脿n)娈歘闂�(gu膩n)鐨勯浕闃昏�屾悕澶卞お澶氾級銆侻OSFET浣滅偤闁嬮棞(gu膩n)鏅�(sh铆)锛屽叾婧愭サ鑸囨紡妤电殑鍒嗗垾鍜屽叾浠栫殑鎳�(y墨ng)鐢ㄦ槸涓嶅お鐩稿悓鐨�锛屽洜?y脿n)姗涘郸?h脿o)鍙互寰濵OSFET鏌垫サ浠ュ鐨勪换涓�绔��(j矛n)鍑�銆傚皪(du矛)NMOS闁嬮棞(gu膩n)鑰岃█锛岄浕澹撴渶璨�(f霉)鐨勪竴绔氨鏄簮妤�锛孭MOS鍓囨濂界浉鍙�锛岄浕澹撴渶姝ｇ殑涓�绔槸婧愭サ銆侻OSFET闁嬮棞(gu膩n)鑳藉偝杓�?sh霉)鎸犲郸?h脿o)鏈�(hu矛)鍙楀埌鍏舵煹妤碘�旀簮妤�銆佹煹妤碘�旀紡妤�锛屼互鍙婃紡妤靛埌婧愭サ鐨勯浕澹撻檺鍒讹紝濡傛灉瓒呴亷浜嗛浕澹撶殑涓婇檺鍙兘鏈�(hu矛)灏�(d菐o)鑷碝OSFET鐕掓瘈銆�
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