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銆�銆�1959骞�锛�1965骞磋璨濈埦鐗╃悊瀛�(xu茅)鐛�(ji菐ng)鐛插緱鑰匯ichard P Feynman鎻愬嚭寰瀷姗�(j墨)姊扮殑妲�(g貌u)鎯炽��
銆�銆�1962骞�锛岀寰瀷澹撳姏鍌虫劅鍣ㄥ晱涓�锛屼箣鍚�50锝�500寰背鐨勯綊杓�锛岄綊杓车锛屾埃鍕�(d貌ng)娓﹁吉鍙婅伅(li谩n)鎺ヤ欢绛夊井绯荤当(t菕ng)鍟忎笘銆�
銆�銆�1966-1972骞达紝鍩烘湰鐨勫井鍔犲伐鎶�琛�(sh霉)鐧�(f膩)灞�锛屽埗閫犲嚭寰(j墨)姊板厓浠�銆�
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銆�銆�1980骞翠唬锛岀寰姞宸ユ妧琛�(sh霉)杩呯寷鐧�(f膩)灞�锛屽埄鐢ㄧ姧鐗插堡鑵愯潟鎶�琛�(sh霉)鐛插緱浜嗗井鍙嫊(d貌ng)姗�(j墨)妲�(g貌u)銆�
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銆�銆�2銆佺祼(ji茅)妲�(g貌u)涓婂劒(y艒u)鍕�(sh矛)鑸囩壒榛�(di菐n)
銆�銆�MOEMS鐨勯珨绌嶉潪甯稿皬锛屽昂瀵稿皬鑷冲咕寰背锛屽ぇ涔熶笉閬庡咕姣背锛涢熆鎳�(y墨ng)閫熷害鍦�100ns锝�1s鐨勮寖鍦嶅収(n猫i)锛涘叾鍙嫊(d貌ng)绲�(ji茅)妲�(g貌u)閫氬父鐢遍潨闆昏嚧鍕�(d貌ng)锛岃嚧鍕�(d貌ng)鑳界偤CV2锛�2锛涘叾绲�(ji茅)妲�(g貌u)鍙互鍋氬埌鐩哥暥(d膩ng)寰�(f霉)闆滐紝鍖呭惈鍏冧欢鏁�(sh霉)鐩仈(d谩)鍒�1鍊�(g猫)锝�106鍊�(g猫)銆�
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