銆�銆�钖勮啘鏅堕珨绠� (鑻辨枃鍚嶇ū鐐篢hin-film transistor锛岀啊绋盩FT) 鏄牬鏁堟噳(y墨ng)鏅堕珨绠�鐨勭ó椤炰箣涓�锛屽ぇ鐣ョ殑鍒朵綔鏂瑰紡鏄湪鍩烘澘涓婃矇绌嶅悇绋笉鍚岀殑钖勮啘锛屽鍗婂皫(d菐o)楂斾富鍕曞堡銆佷粙闆诲堡鍜岄噾灞浕妤靛堡銆傝杽鑶滄櫠楂旂鏄恫鏅�椤ず鍣�鐨勯棞(gu膩n)閸靛櫒浠�,灏嶉’绀哄櫒浠剁殑宸ヤ綔鎬ц兘鍏锋湁鍗佸垎閲嶈鐨勪綔鐢�.
銆�銆�浜洪灏� TFT 鐨勭爺绌跺伐浣滃凡缍�(j墨ng)鏈夊緢闀风殑姝峰彶. 鏃╁湪 1925 骞�, Julius Edger Lilienfeld 棣栨鎻愬嚭绲�(ji茅)鍨嬪牬鏁堟噳(y墨ng)鏅堕珨绠� (FET) 鐨勫熀鏈畾寰�,闁嬭緹浜嗗皪鍥烘厠(t脿i)鏀惧ぇ鍣ㄧ殑鐮旂┒.1933 骞�,Lilienfeld 鍙堝皣绲曠罚鏌电祼(ji茅)妲�(g貌u)寮曢�插牬鏁堟噳(y墨ng)鏅堕珨绠�(鍚庝締琚ū鐐� MISFET).1962 骞�,Weimer 鐢ㄥ鏅� CaS 钖勮啘鍋氭垚 TFT;闅ㄥ悗,鍙堟秾鐝�(xi脿n)浜嗙敤 CdSe,InSb,Ge 绛夊崐灏�(d菐o)楂旀潗鏂欏仛鎴愮殑 TFT 鍣ㄤ欢.浜屽崄涓栫磤鍏崄骞翠唬,鍩轰簬浣庤不鐢�,澶ч櫍鍒楅’绀虹殑瀵﹂殯闇�姹�,TFT 鐨勭爺绌跺唬鐐鸿垐璧�.1973 骞�,Brody 绛変汉 136 鍏� 瀛� 鎶� 琛�(sh霉) 2006 骞� 9 鏈� 棣栨鐮斿埗鍑烘湁婧愮煩闄ｆ恫鏅堕’绀�(AMLCD) ,骞剁敤 CdSe TFT 浣滅偤闁嬮棞(gu膩n)鍠厓.闅ㄨ憲澶氭櫠纭呮懟闆滃伐钘濈殑鐧�(f膩)灞�,1979 骞� 鍚庝締瑷卞瀵﹂瀹ら兘閫茶浜嗗皣 AMLCD LeComber,Spear 鍜� Ghaith 鐢� a-Si:H 鍋氭湁婧愬堡,鍋氭垚濡傚湒 1 鎵�绀虹殑 TFT 鍣ㄤ欢. 浠ョ幓鐠冪偤瑗簳鐨勭爺绌�.浜屽崄涓栫磤鍏崄骞翠唬,纭呭熀 TFT 鍦� AMLCD 涓湁钁楁サ閲嶈鐨勫湴浣�,鎵�鍋氭垚鐨勭敘(ch菐n)鍝佸崰鎿�(j霉)浜嗗競鍫寸禃 澶ч儴鍒嗕唤椤�.1986 骞� Tsumura 绛変汉棣栨鐢ㄨ仛鍣诲惄鐐哄崐灏�(d菐o)楂旀潗鏂欏埗鍌欎簡鏈夋钖勮啘鏅堕珨绠�(OTFT) ,OTFT 鎶�琛�(sh霉)寰炴闁� 濮嬪緱鍒扮櫦(f膩)灞�.涔濆崄骞翠唬,浠ユ湁姗熷崐灏�(d菐o)楂旀潗鏂欎綔鐐烘椿鎬у堡鎴愮偤鏂扮殑鐮旂┒鐔遍粸.鐢变簬鍦ㄥ埗閫犲伐钘濆拰鎴愭湰涓婄殑鍎�(y艒u)鍕�,OTFT 琚獚鐐哄皣渚嗘サ鍙兘鎳�(y墨ng)鐢ㄥ湪 LCD,OLED 鐨勯﹨(q奴)鍕曚腑.杩戝勾渚�,OTFT 鐨勭爺绌跺彇寰椾簡绐佺牬鎬х殑閫插睍.1996 骞�,椋涘埄娴﹀叕 鍙搁噰鐢ㄥ灞よ杽鑶滅枈鍚堟硶鍒朵綔浜嗕竴濉� 15 寰厠璁婃垚纰肩櫦(f膩)鐢熷櫒(PCG) ;鍗充娇鐣�(d膩ng)钖勮啘鍤撮噸鎵洸,浠嶈兘姝ｅ父宸ヤ綔.1998 骞�, 鐨勭劇瀹氬瀷閲戝爆姘у寲鐗╅嫰閰搁媷浣滅偤骞朵簲鑻湁姗熻杽鑶滄櫠楂旂鐨勬煹绲� IBM鍏徃鐢ㄤ竴绋柊鍨嬬殑鍏锋湁鏇撮珮鐨勪粙闆诲父鏁�(sh霉) 绶ｅ堡,浣胯┎鍣ㄤ欢鐨勯﹨(q奴)鍕曢浕澹撻檷浣庝簡 4V,閬风Щ鐜囬仈鍒� 0.38cm2V-1 s-1.1999 骞�,Bell瀵﹂瀹ょ殑 Katz 鍜屼粬鐨勭爺绌跺皬绲勫埗 寰椾簡鍦ㄥ婧笅绌烘埃涓兘绌�(w臎n)瀹氬瓨鍦ㄧ殑鍣诲惄钖勮啘,骞朵娇鍣ㄤ欢鐨勯伔绉荤巼閬斿埌 0.1 cm2V-1 s-1.Bell 瀵﹂瀹ょ敤骞朵簲鑻柈鏅跺埗寰� 閫欏悜鏈夋闆嗘垚 浜嗕竴绋洐妤靛瀷鏈夋钖勮啘鏅堕珨绠�, 瑭插櫒浠跺皪闆诲瓙鍜岀┖绌寸殑閬风Щ鐜囧垎鍒ラ仈鍒� 2.7 cm2V-1 s-1 鍜� 1.7 cm2V-1 s-1, 闆昏矾鐨勫闅涙噳(y墨ng)鐢ㄩ倎鍑轰簡閲嶈鐨勪竴姝�.鏈�杩戝咕骞�,闅ㄨ憲閫忔槑姘у寲鐗╃爺绌剁殑娣卞叆,浠� ZnO,ZIO 绛夊崐灏�(d菐o)楂旀潗鏂欎綔鐐烘椿鎬� 灞ゅ埗浣滆杽鑶滄櫠楂旂,鍥犳�ц兘鏀归�查’钁椾篃鍚稿紩浜嗚秺渚嗚秺澶氱殑鑸堣叮.鍣ㄤ欢鍒跺倷宸ヨ棟寰堝唬娉�,姣斿:MBE,CVD,PLD 绛�, 鍧囨湁鐮旂┒.ZnO-TFT 鎶�琛�(sh霉)涔熷彇寰椾簡绐佺牬鎬ч�插睍.2003 骞�,Nomura绛変汉浣跨敤鍠櫠 InGaO3 (ZnO)5 鐛插緱浜嗛伔绉荤巼鐐� 80 cm2V-1 s-1 鐨� TFT 鍣ㄤ欢.缇庡湅鏉滈偊鍏徃閲囩敤鐪熺┖钂搁崓鍜屾帺鑶滄搵鏉挎妧琛�(sh霉)鍦ㄨ仛閰颁簽閵ㄦ煍鎬цク搴曚笂闁嬬櫦(f膩)浜� ZnO-TFT,闆� 閫欐槸鍦ㄨ仛閰颁簽閵ㄦ煍鎬цク搴曚笂棣栨鐮斿埗鎴愬姛浜嗛珮閬风Щ鐜囩殑 ZnO-TFT, 閫欓爯(y霉)绀鸿憲鍦ㄦ哀鍖栫墿 TFT 瀛愰伔绉荤巼鐐� 50 cm2V-1 s-1. 2006 骞�, Cheng 闋�(l菒ng)鍩熸柊绔剁埈鐨勯枊濮�. 2005 骞�, Chiang H Q 绛変汉鍒╃敤 ZIO 浣滅偤娲绘�у堡鍒跺緱闁嬮棞(gu膩n)姣旂偤 107 钖勮啘鏅堕珨绠�. H C绛変汉鍒╃敤 CBD 鏂规硶鍒跺緱闁嬮棞(gu膩n)姣旂偤 105 ,閬风Щ鐜囩偤 0.248cm2V-1s-1 鐨� TFT,閫欎篃椤ず鍑哄闅涙噳(y墨ng)鐢ㄧ殑鍙兘.
銆�銆�钖勮啘鏅堕珨绠℃槸涓�绋禃绶ｆ煹鍫存晥鎳�(y墨ng)鏅堕珨绠�.瀹冪殑宸ヤ綔鐙�鎱�(t脿i)鍙互鍒╃敤 Weimer 琛ㄥ緛鐨勫柈鏅剁 MOSFET 宸ヤ綔鍘熺悊渚嗘弿 杩�.浠� n 婧� MOSFET 鐐轰緥,鐗╃悊绲�(ji茅)妲�(g貌u)濡傚湒 2. 鐣�(d膩ng)鏌垫サ鏂戒互姝ｉ浕澹撴檪,鏌靛鍦ㄦ煹绲曠罚灞や腑鐢�(ch菐n)鐢熼浕鍫�,闆诲姏绶氱敱鏌甸浕妤垫寚鍚戝崐灏�(d菐o)楂旇〃闈�,骞跺湪琛ㄩ潰铏曠敘(ch菐n)鐢熸劅鎳�(y墨ng)闆� 鑽�.闅ㄨ憲鏌甸浕澹撳鍔�,鍗婂皫(d菐o)楂旇〃闈㈠皣鐢辫�楃洝灞よ綁(zhu菐n)璁�?y艒u)娈″ó鑷僥绱堡,褰㈡垚鍙嶅瀷灞�.鐣�(d膩ng)閬斿埌寮峰弽鍨嬫檪(鍗抽仈鍒伴枊鍟熼浕澹� 鏅�) ,婧�,婕忛枔鍔犱笂闆诲灏辨渻鏈夎級娴佸瓙閫氶亷婧濋亾.鐣�(d膩ng)婧愭紡闆诲寰堝皬鏅�,灏�(d菐o)闆绘簼閬撹繎浼肩偤涓�鎭掑畾闆婚樆,婕忛浕娴侀毃婧愭紡闆� 澹撳鍔犺�岀窔鎬у澶�. 鐣�(d膩ng)婧愭紡闆诲寰堝ぇ鏅�,瀹冩渻灏嶆煹闆诲鐢�(ch菐n)鐢熷奖闊�,浣垮緱鏌电禃绶ｅ堡涓浕鍫寸敱婧愮鍒版紡绔�愭几娓涘急,鍗婂皫(d菐o)楂旇〃闈㈠弽鍨嬪堡 涓浕瀛愮敱婧愮鍒版紡绔�愭几娓涘皬,婧濋亾闆婚樆闅ㄨ憲婧愭紡闆诲澧炲ぇ鑰屽鍔�.婕忛浕娴佸鍔犺畩寰楃珐鎱�,灏嶆噳(y墨ng)绶氭�у崁(q奴)鍚戦＝鍜屽崁(q奴)閬� 娓�.鐣�(d膩ng)婧愭紡闆诲澧炲埌涓�瀹氱▼搴�,婕忕鍙嶅瀷灞ゅ帤搴︽笡鐐洪浂,闆诲鍦ㄥ鍔�,鍣ㄤ欢閫插叆椋藉拰鍗�(q奴).鍦ㄥ闅� LCD 鐢熺敘(ch菐n)涓�,涓� 瑕佸埄鐢� a-Si:H TFT 鐨勯枊鎱�(t脿i)(澶т簬闁嬪暉闆诲)灏嶅儚绱犻浕瀹瑰揩閫熷厖闆�,鍒╃敤闂�(gu膩n)鎱�(t脿i)渚嗕繚鎸佸儚绱犻浕瀹圭殑闆诲,寰炶�屽鐝�(xi脿n)蹇� 閫熼熆鎳�(y墨ng)鍜岃壇濂藉瓨鍎茬殑绲�(t菕ng)涓�.
銆�銆�鏈締 TFT 鎶�琛�(sh霉)灏囨渻浠ラ珮瀵嗗害,楂樺垎杈ㄧ巼,绡�(ji茅)鑳藉寲,杓曚究鍖�,闆嗘垚鍖栫偤鐧�(f膩)灞曚富娴�,寰炴湰鏂囪珫杩扮殑钖勮啘鏅堕珨绠＄櫦(f膩)灞� 姝峰彶浠ュ強灏嶅吀鍨� TFT 鍣ㄤ欢鎬ц兘鍒嗘瀽渚嗙湅,闆栫劧鏂板瀷 OTFT,ZnO-TFT 鐨勭爺绌跺凡缍�(j墨ng)鎻ず鍑哄劒(y艒u)鑹殑鐗规��,鐢氳嚦鏈夌殑宸茬稉(j墨ng) 闁嬪浣跨敤鍖�,浣嗗鐝�(xi脿n)澶ц(gu墨)妯＄殑鍟嗘キ(y猫)鍖栦互鍙婇�蹭竴姝ラ檷浣庢垚鏈瓑鏂归潰,閭勯渶瑕佸緢澶氬姫鍔�.鍥犳鍦ㄥ緢闀蜂竴娈垫檪闁撳収(n猫i)灏囨渻鑸� 纭呭熀鏉愭枡鍣ㄤ欢骞跺瓨.鎴戝湅澶ч櫢鐨勯’绀烘妧琛�(sh霉)铏曚簬鍓涢枊濮嬮殠娈�,灏嶆柊鍨� TFT 鍣ㄤ欢鐨勭爺鐧�(f膩)浠ュ強椤ず鎶�琛�(sh霉)鐨勬噳(y墨ng)鐢ㄥ付渚嗕簡閲嶅ぇ 鐨勬閬囧拰鎸戞埌(zh脿n). 鐩镐俊鍦ㄤ笉涔呯殑灏囦締, OTFT 鍜� ZnO-TFT 绛夋柊鍨嬪櫒浠剁偤鍩虹(ch菙)鐨勭敘(ch菐n)鍝佹渻鎺ㄥ嫊涓嬩竴浠ｅ厜闆诲瓙瀛�(xu茅)鐨勭獊椋涚寷閫�.
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