鎮ㄥソ锛屾杩庝締鍒扮董搴浕瀛愬競鍫�(ch菐ng)缍�(w菐ng)
鐧婚寗 | 鍏嶈不(f猫i)娉ㄥ唺(c猫)
銆�銆�鍏夐浕鎺㈡脯(c猫)鍣ㄦ槸灏囧厜淇¤櫉(h脿o)杞�(zhu菐n)璁�?y艒u)娈″é鐩�?h脿o)鐨勫櫒浠�锛岄洩宕╁厜闆绘帰娓�(c猫)鍣ㄩ噰鐢ㄧ殑鍗虫槸闆穿鍏夐浕浜屾サ绠�(APD)锛岃兘澶犲叿鏈夋洿澶х殑闊挎噳(y墨ng)搴�銆侫PD灏囦富瑕佹噳(y墨ng)鐢ㄤ簬闀�(zh菐ng)璺濋洟鎴栨帴鏀跺厜鍔熺巼鍙楀埌鍏跺畠闄愬埗鑰岃純灏忕殑鍏夌簴閫氫俊绯荤当(t菕ng)銆傜洰鍓嶅緢澶氬厜鍣ㄤ欢灏堝灏�(du矛)APD鐨勫墠鏅崄鍒嗙湅濂斤紝瑾�(r猫n)鐐篈PD鐨勭爺绌跺皪(du矛)浜庡寮�(qi谩ng)鐩搁棞(gu膩n)闋�(l菒ng)鍩熺殑鍦嬮殯绔�(j矛ng)鐖�(zh膿ng)鍔�锛屾槸鍗佸垎蹇呰鐨勩��
銆�銆�1)Si
銆�銆�Si鏉愭枡鎶�琛�(sh霉)鏄竴绋垚鐔熸妧琛�(sh霉)锛屽唬娉涙噳(y墨ng)鐢ㄤ簬寰浕瀛愰牁(l菒ng)鍩燂紝浣嗗苟涓嶉仼鍚堝埗鍌欑洰鍓嶅厜閫氫俊闋�(l菒ng)鍩熸櫘閬嶆帴鍙楃殑1.31mm,1.55mm娉㈤暦(zh菐ng)鑼冨湇鐨勫櫒浠�銆�
銆�銆�2)Ge
銆�銆�Ge APD闆栫劧鍏夎瓬闊挎噳(y墨ng)閬╁悎鍏夌簴鍌宠几?sh霉)铔絧鑰�銆佷綆鑹叉暎鐨勮姹�锛屼絾鍦ㄥ埗鍌欏伐钘濅腑瀛樺湪寰堝ぇ鐨勫洶闆ｃ�傝�屼笖锛孏e鐨勯浕瀛愬拰绌虹┐鐨勯洟鍖栫巼姣旂巼锛� 锛夋帴杩�1锛屽洜姝ゅ緢闆ｅ埗鍌欏嚭楂樻�ц兘鐨凙PD鍣ㄤ欢銆�
銆�銆�3)In0.53Ga0.47As/InP
銆�銆�閬告搰In0.53Ga0.47As浣滅偤APD鐨勫厜鍚告敹灞�锛孖nP浣滅偤鍊嶅灞�锛屾槸涓�绋瘮杓冩湁鏁堢殑鏂规硶[2]銆侷n0.53Ga0.47As鏉愭枡鐨勫惛鏀跺嘲鍊煎湪1.65mm, 鍦�1.31mm,1.55mm 娉㈤暦(zh菐ng)鏈夌磩鐐�104cm-1楂樺惛鏀剁郴鏁�(sh霉)锛屾槸鐩墠鍏夋帰娓�(c猫)鍣ㄥ惛鏀跺堡鏉愭枡銆侷n0.53Ga0.47As鍏夐浕浜屾サ绠℃瘮璧稧e鍏夐浕浜屾サ绠�锛屾湁濡備笅鍎�(y艒u)榛�(di菐n)锛氾紙1锛塈n0.53Ga0.47As鏄洿鎺ュ付闅欏崐灏�(d菐o)楂�锛屽惛鏀剁郴鏁�(sh霉)楂橈紱锛�2锛塈n0.53Ga0.47As浠嬮浕甯告暩(sh霉)姣擥e灏�锛岃寰楀埌鑸嘒e鍏夐浕浜屾サ绠＄浉鍚岀殑閲忓瓙鏁堢巼鍜岄浕瀹�锛屽彲浠ユ笡灏慖n0.53Ga0.47As鑰楃洝灞ょ殑鍘氬害锛屽洜姝ゅ彲浠ラ爯(y霉)鏈烮n0.53Ga0.47As/InP鍏変簩妤电鍏锋湁楂樼殑鏁堟噳(y墨ng)鍜岄熆鎳�(y墨ng)锛涳紙3锛夐浕瀛愬拰绌虹┐鐨勯洟鍖栫巼姣旂巼锛� 锛変笉鏄�1锛屼篃灏辨槸瑾狪n0.53Ga0.47As/InP APD鍣伈杓冧綆锛涳紙4锛塈n0.53Ga0.47As鑸嘔nP鏅舵牸瀹屽叏鍖归厤锛岀敤MOCVD鏂规硶鍦↖nP瑗簳涓婂彲浠ョ敓闀�(zh菐ng)鍑洪珮璩�(zh矛)閲忕殑In0.53Ga0.47As澶栧欢灞�锛屽彲浠ラ’钁楃殑闄嶄綆閫氶亷p-n绲�(ji茅)鐨勬殫闆绘祦銆傦紙5锛塈n0.53Ga0.47As/InP鐣拌唱(zh矛)绲�(ji茅)妲�(g貌u)澶栧欢鎶�琛�(sh霉)锛屽緢瀹规槗鍦ㄥ惛鏀跺崁(q奴)鐢熼暦(zh菐ng)杓冮珮甯堕殭鐨勭獥鍙ｅ堡锛岀敱姝ゅ彲浠ユ秷闄よ〃闈㈠京(f霉)鍚堝皪(du矛)閲忓瓙鏁堢巼鐨勫奖闊�銆�
銆�銆�4)InGaAsP/InP
銆�銆�閬告搰InGaAsP浣滅偤鍏夊惛鏀跺堡锛孖nP浣滅偤鍊嶅灞�,鍙互鍒跺倷闊挎噳(y墨ng)娉㈤暦(zh菐ng)鍦�1-1.4mm锛岄珮閲忓瓙鏁堢巼锛屼綆鏆楅浕娴�锛岄珮闆穿澧炵泭寰楃殑APD銆傞�氶亷閬告搰涓嶅悓鐨勫悎閲戠祫鍒�锛屾豢瓒冲皪(du矛)鐗瑰畾娉㈤暦(zh菐ng)鐨勬�ц兘銆�
銆�銆�)InGaAs/InAlAs
銆�銆�In0.52Al0.48As鏉愭枡甯堕殭瀵紙1.47 eV锛�锛屽湪1.55 mm 娉㈤暦(zh菐ng)鑼冨湇涓嶅惛鏀讹紝鏈夎瓑鎿�(j霉)椤ず锛岃杽In0.52Al0.48As澶栧欢灞ゅ湪绱旈浕瀛愭敞鍏ョ殑姊濅欢涓嬶紝浣滅偤鍊嶅灞ゆ潗鏂�锛屽彲浠ョ嵅寰楁瘮InP鏇村ソ鐨勫鐩婄壒鎬�銆�
銆�銆�6)InGaAs/InGaAs锛圥锛�/InAlAs鍜孖nGaAs/In锛圓l锛塆aAs/InAlAs
銆�銆�鏉愭枡鐨勭鎾為洟鍖栫巼鏄奖闊緼PD鎬ц兘鐨勯噸瑕佸洜绱�銆傜爺绌惰〃鏄嶽6]锛屽彲浠ラ�氶亷寮曞叆InGaAs锛圥锛�/InAlAs鍜� In锛圓l锛塆aAs/InAlAs瓒呮櫠鏍肩祼(ji茅)妲�(g貌u)鎻愰珮鍊嶅灞ょ殑纰版挒闆㈠寲鐜�銆傛噳(y墨ng)鐢ㄨ秴鏅舵牸绲�(ji茅)妲�(g貌u)閫欎竴鑳藉付宸ョ▼鍙互浜虹偤鎺у埗灏�(d菐o)甯跺拰鍍�(ji脿)甯跺�奸枔鐨勯潪灏�(du矛)绋辨�у付閭婁笉閫ｇ簩(x霉)鎬�锛屽苟淇濊瓑灏�(d菐o)甯朵笉閫ｇ簩(x霉)鎬ч仩(yu菐n)閬�(yu菐n)澶т簬鍍�(ji脿)甯朵笉閫ｇ簩(x霉)鎬э紙螖Ec>>螖Ev锛�銆傝垏InGaAs楂旀潗鏂欑浉姣旓紝InGaAs/InAlAs閲忓瓙闃遍浕瀛愰洟鍖栫巼(a)鏄庨’澧炲姞锛岄浕瀛愬拰绌虹┐鐛插緱浜嗛澶栬兘閲�锛岀敱浜幬擡c>>螖Ev锛屽彲浠ラ爯(y霉)鏈熼浕瀛愭墍鐛插緱鐨勮兘閲忎娇闆诲瓙闆㈠寲鐜囩殑澧炲姞閲忛仩(yu菐n)閬�(yu菐n)澶т簬绌虹┐鑳介噺灏�(du矛)绌虹┐闆㈠寲鐜�(b)鐨勮并鐛�(xi脿n)锛岄浕瀛愰洟鍖栫巼鑸囩┖绌撮洟鍖栫巼鐨勬瘮鐜囷紙k锛夊鍔�銆傚洜姝�锛屾噳(y墨ng)鐢ㄨ秴鏅舵牸绲�(ji茅)妲�(g貌u)鍙互鐛插緱澶х殑澧炵泭-甯跺绌嶏紙GBW锛夊拰浣庡櫔鑱叉�ц兘銆傜劧鑰�锛岄�欑ó鍙互浣縦鍊煎鍔犵殑InGaAs/InAlAs閲忓瓙闃辩祼(ji茅)妲�(g貌u)APD寰堥洠鎳�(y墨ng)鐢ㄥ湪鍏夋帴鏀舵(j墨)涓�銆傞�欐槸鍥�?y脿n)姗涚粖鎴啱?y墨ng)搴︾殑鍊嶅鍥犲瓙鍙楅檺浜庢殫闆绘祦锛岃�屼笉鏄�嶅鍣伈銆傚湪姝ょ祼(ji茅)妲�(g貌u)涓�锛屾殫闆绘祦涓昏鏄敱绐勫付闅欑殑InGaAs闃卞堡鐨勯毀閬撴晥鎳�(y墨ng)寮曡捣锛屽洜姝�锛屽紩鍏ュ甯堕殭鐨勫洓鍏冨悎閲�锛屾瘮濡侷nGaAsP鎴朓nAlGaAs,浠ｆ浛InGaAs浣滅偤閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勯槺灞ゅ彲浠ユ姂鍒舵殫闆绘祦銆�
銆�銆�鍦ㄧ浉鍚岀殑闆诲牬(ch菐ng)涓嬶紝瓒呮櫠鏍肩祼(ji茅)妲�(g貌u)鍙互澶уぇ鎻愰珮k,琛ㄦ槑瓒呮櫠鏍肩祼(ji茅)妲�(g貌u) 鐨勫櫒浠跺叿鏈夋洿澶х殑淇″櫔姣斻�傜爺绌惰〃鏄�锛孖nAlGaAs/InAlAs閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勫钩鍧囪兘闅欑偤1.32 eV, InAlGaAs鍜孖nAlAs鐨勫付闅欏�煎垎鍒ョ偤1.13 eV鍜�1.47 eV,閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勮兘闅欏�间粙浜嶪nAlGaAs鍜孖nAlAs鐨勫付闅欏�间箣闁撱�傞噺瀛愰槺绲�(ji茅)妲�(g貌u)鐨勭┖绌撮洟鍖栫巼杩戜技绛変簬InAlGaAs鍜孖nAlAs绌虹┐闆㈠寲鐜囩殑骞冲潎鍊�锛屽洜姝nAlGaAs/InAlAs绲�(ji茅)妲�(g貌u)鐨勭┖绌撮洟鍖栫巼鍙互鐢ㄥ付闅欏樊渚嗗緢濂界殑瑙ｉ噵銆傜劧鑰屽皪(du矛)浜庨浕瀛愰洟鍖栫巼渚嗚锛岄噺瀛愰槺绲�(ji茅)妲�(g貌u)姣擨nAlGaAs鍜孖nAlAs鐨勫�奸兘澶�銆傞�欑ó宸暟琛ㄦ槑闆诲瓙纰版挒闆㈠寲鐜囩殑澧炲姞鏄敱浜庡ぇ鐨勫皫(d菐o)甯跺樊锛埼擡c锛夊紩璧风殑銆傚湪InGaAsP/InAlAs 鐣拌唱(zh矛)绲�(ji茅)涓�锛岄�欑ó澶х殑灏�(d菐o)甯跺樊鏇寸偤鏄庨’锛岃�屽児(ji脿)甯剁殑宸暟閫氶亷P鐨勫紩鍏ュ咕涔庢秷澶�锛岄爯(y霉)鏈烮nGaAsP/InAlAs APD鍏锋湁鏇村ぇ鐨勯浕瀛愮鎾為洟鍖栫巼銆�
銆�銆�鍚堢悊鐨勮姱鐗囩祼(ji茅)妲�(g貌u)鏄珮鎬ц兘鍣ㄤ欢鐨勫熀鏈繚璀夈�侫PD绲�(ji茅)妲�(g貌u)瑷�(sh猫)瑷�(j矛)涓昏鑰冩叜RC鏅�(sh铆)闁撳父鏁�(sh霉),鍦ㄧ暟璩�(zh矛)绲�(ji茅)鐣岄潰鐨勭┖绌翠繕鐛�,杓夋祦瀛愰�氶亷鑰楃洝鍗�(q奴)鐨勬浮瓒婃檪(sh铆)闁撶瓑鍥犵礌銆備笅闈㈠皪(du矛)鍏剁祼(ji茅)妲�(g貌u)鐨勭櫦(f膩)灞曚綔涓�缍滆堪锛�
銆�銆�1锛夊熀鏈祼(ji茅)妲�(g貌u)
銆�銆�鏈�绨�(ji菐n)鍠殑APD绲�(ji茅)妲�(g貌u)鏄湪PIN鍏夐浕浜屾サ绠＄殑鍩虹(ch菙)涓�锛屽皪(du矛)P鍗�(q奴)鍜孨鍗�(q奴)閮介��(j矛n)琛屼簡閲�?f霉)璇玸锛屽湪閯拌繎P鍗�(q奴)鎴朜鍗�(q奴)寮曢��(j矛n)n鍨嬫垨p鍨嬪�嶆啂鍗�(q奴)锛屼互鐢�(ch菐n)鐢熶簩娆￠浕瀛愬拰绌虹┐灏�(du矛)锛屽緸鑰屽(sh铆)鐝�(xi脿n)灏�(du矛)涓�娆″厜闆绘祦鐨勬斁澶т綔鐢ㄣ�傚皪(du矛)浜嶪nP 绯诲垪鏉愭枡渚嗚锛岀敱浜庣┖绌寸鎾為浕闆㈢郴鏁�(sh霉)澶т簬闆诲瓙纰版挒闆婚洟绯绘暩(sh霉)锛岄�氬父灏嘚鍨嬫懟闆滅殑澧炵泭鍗�(q奴)缃簬P鍗�(q奴)鐨勪綅缃�銆傚湪鐞嗘兂鎯呮硜涓�锛屽彧鏈夌┖绌存敞鍏ュ埌澧炵泭鍗�(q奴)锛屾墍浠ョū閫欑ó绲�(ji茅)妲�(g貌u)鐐虹┖绌存敞鍏ュ瀷绲�(ji茅)妲�(g貌u)銆�
銆�銆�2锛夊惛鏀跺拰澧炵泭鍗�(q奴)鍒嗛枊
銆�銆�鐢变簬InP瀵付闅欑壒鎬э紙InP鐐�1.35eV, InGaAs鐐�0.75eV锛�锛岄�氬父浠nP鐐哄鐩婂崁(q奴)鏉愭枡锛孖nGaAs鐐哄惛鏀跺崁(q奴)鏉愭枡銆�
銆�銆�3锛夊垎鍒ュ惛鏀躲�佹几璁�銆佸鐩婏紙SAGM锛夌祼(ji茅)妲�(g貌u)鐨勬彁鍑�
銆�銆�鐩墠鍟嗗搧鍖栫殑APD鍣ㄤ欢澶ч兘閲囩敤InP/InGaAs鏉愭枡锛孖nGaAs浣滅偤鍚告敹灞�锛孖nP鍦ㄨ純楂橀浕鍫�(ch菐ng)涓�(>5x105V/cm)涓嬭�屼笉琚搳绌�锛屽彲浠ヤ綔鐐哄鐩婂崁(q奴)鏉愭枡銆傚皪(du矛)浜庤┎鏉愭枡锛� 鎵�浠ラ�欑óAPD鐨勮ō(sh猫)瑷�(j矛)鏄洩宕╅亷绋嬬敱绌虹┐纰版挒鑰屽湪n鍨婭nP涓舰鎴�?锛熺搐]鍒癐nP鍜孖nGaAs鐨勫付闅欏樊鍒ヨ純澶�,鍍�(ji脿)甯朵笂澶х磩0.4eV鐨勮兘绱�(j铆)宸娇寰楀湪InGaAs鍚告敹灞や腑鐢�(ch菐n)鐢熺殑绌虹┐锛屽湪閬�(d谩)鍒癐nP鍊嶅灞や箣鍓嶅湪鐣拌唱(zh矛)绲�(ji茅)閭婄罚鍙楀埌闃荤鑰岄�熷害澶уぇ娓涘皯锛屽緸鑰岄�欑ó APD鐨勯熆鎳�(y墨ng)鏅�(sh铆)闁撻暦(zh菐ng)锛屽付瀵緢绐勩�傞�欏��(g猫)鍟忛鍙互鍦ㄥ叐绋潗鏂欎箣闁撳姞InGaAsP閬庢浮灞よ�屽緱鍒拌В姹�銆�
銆�銆�4锛夊垎鍒ュ惛鏀躲�佹几璁�銆侀浕鑽峰拰澧炵泭锛圫AGCM锛夌祼(ji茅)妲�(g貌u)鐨勬彁鍑�
銆�銆�鐐轰簡閫�(j矛n)涓�姝ヨ(di脿o)绡�(ji茅)鍚告敹灞ゅ拰澧炵泭灞ょ殑闆诲牬(ch菐ng)鍒嗗竷锛屽湪鍣ㄤ欢瑷�(sh猫)瑷�(j矛)涓紩鍏ヤ簡闆昏嵎灞�锛岄�欑ó鏀归��(j矛n)澶уぇ鐨勬彁楂樹簡鍣ㄤ欢閫熺巼鍜岄熆鎳�(y墨ng)搴︺��
銆�銆�5锛夎鎸厰澧炲挤(qi谩ng)鍨� (RCE) SAGCM绲�(ji茅)妲�(g貌u)
銆�銆�鍦ㄤ互涓婂偝绲�(t菕ng)鎺㈡脯(c猫)鍣ㄧ殑鍎�(y艒u)鍖栬ō(sh猫)瑷�(j矛)涓�锛屽繀闋堥潰鑷ㄩ�欐ǎ涓�鍊�(g猫)浜嬪(sh铆)锛氬嵆鍚告敹灞ょ殑鍘氬害灏�(du矛)鍣ㄤ欢閫熺巼鍜岄噺瀛愭晥鐜囨槸涓�鍊�(g猫)鐭涚浘鐨勫洜绱�銆傝杽鐨勫惛鏀跺堡鍘氬害鍙互娓涘皯杓夋祦瀛愭浮瓒婃檪(sh铆)闁擄紝鍥犳鍙互鐛插緱澶х殑甯跺锛涚劧鑰岋紝鍚屾檪(sh铆)鐐轰簡寰楀埌鏇撮珮鐨勯噺瀛愭晥鐜�锛岄渶瑕佸惛鏀跺堡鍏锋湁瓒冲鐨勫帤搴︺�傝В姹洪�欏��(g猫)鍟忛鍙互閲囩敤璜ф尟鑵旓紙RCE锛夌祼(ji茅)妲�(g貌u)锛屽嵆鍦ㄥ櫒浠剁殑搴曢儴鍜岄爞閮ㄨō(sh猫)瑷�(j矛)DBR (distributed Bragg Reflector)銆傞�欑óDBR鍙嶅皠閺″湪绲�(ji茅)妲�(g貌u)涓婂寘鎷綆鎶樺皠鐜囧拰楂樻姌灏勭巼鐨勫叐绋潗鏂�锛屼簩鑰呬氦鏇跨敓闀�(zh菐ng)锛屽悇灞ゅ帤搴︽豢瓒冲湪鍗婂皫(d菐o)楂斾腑鍏ュ皠鍏夋尝闀�(zh菐ng)鐨�1/4銆傞�欑ó璜ф尟鑵旂祼(ji茅)妲�(g貌u)鐨勬帰娓�(c猫)鍣ㄥ湪婊胯冻閫熺巼瑕佹眰鐨勫墠鎻愪笅锛屽惛鏀跺堡鍘氬害鍙互鍋氬緱寰堣杽锛岃�屼笖闆诲瓙鍦ㄧ稉(j墨ng)閬庡娆″弽灏勫悗锛岄噺瀛愭晥鐜囧鍔�銆�
銆�銆�鐢变簬GaAs/AlAs璜ф尟鑵斿伐钘濈殑鎴愮啛锛岀洰鍓嶉�欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠朵互GaAs/AlGaAs鏉愭枡鐐烘渶澶�锛屽鐩�-甯跺绌�300GHz浠ヤ笂銆侷nP/InGaAs璜ф尟鑵旂敱浜嶪nP鍜孖nGaAs鍏╃ó鏉愭枡鎶樺皠鐜囧樊杓冨皬锛屼娇寰楀伐钘濊畩寰楀京(f霉)闆�锛屽洜姝や互InP鐐哄熀鏉愭枡鐨勮鎸厰澧炲挤(qi谩ng)鍨嬫帰娓�(c猫)鍣ㄥ(sh铆)鐢ㄥ寲鐨勫緢灏�銆傜暥(d膩ng)鐒跺彲浠ュ埄鐢ㄩ嵉鍚堟妧琛�(sh霉)锛屾噳(y墨ng)鐢℅aAs/AlAs鐨勬垚鐔熷伐钘�锛屽埗鍌欎互InP鐐哄熀鏉愭枡鐨勮鎸厰澧炲挤(qi谩ng)鍨嬫帰娓�(c猫)鍣�銆傝繎骞翠締鍙堝嚭鐝�(xi脿n)浜嗕互InAlGaAs/InAlAs鎴栬�匢nGaAs(P)/InAlAs鏉愭枡鐨凞BR,鍏舵尝闀�(zh菐ng)浣嶄簬鎴戝�戞劅鑸堣叮鐨勬尝闀�(zh菐ng)鑼冨湇锛屽彈鍒扮爺绌跺拰闁嬬櫦(f膩)浜哄摗鐨勫唬娉涢棞(gu膩n)娉�銆傜敤MBE(鍒嗗瓙鏉熷寤�)鐢熼暦(zh菐ng)鐨勫櫒浠剁祼(ji茅)妲�(g貌u)鍖呮嫭鍗婄禃绶ｇ殑InP瑗簳锛孌BR鍙嶅皠閺★紙30灏�(du矛)鍚勫堡鍘氬害鐐何�/4鐨処nGaAs/InAlAs锛�锛屾湭鎽婚洔鐨処nAlAs鍊嶅灞�锛孭鍨嬫懟闆滅殑InAlAs闆昏嵎灞�锛岄浕鑽峰堡鐨勪綔鐢ㄦ槸纰轰繚60 nm鍘氱殑InAlAs鍚告敹灞ょ殑闆诲牬(ch菐ng)涓嶉珮浜�105 V/cm,淇濊瓑鍣ㄤ欢楂橀�熺巼鐗规�с�傜敓闀�(zh菐ng)鐨勬槸鏈懟闆滅殑InAlAs绌洪枔灞ゅ拰P+-InAlAs闋傚堡锛屽叾鍘氬害閮介��(j矛n)琛屼簡鍎�(y艒u)鍖栬ō(sh猫)瑷�(j矛)浠ョ⒑淇濆櫒浠跺湪鐗瑰畾娉㈤暦(zh菐ng)閮藉叿鏈夌殑闊挎噳(y墨ng)搴︺��
銆�銆�閫欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠跺彲浠ョ嵅寰楀皬浜�10 nA鐨勪綆鏆楅浕娴�锛屽湪鍠綅澧炵泭鐨勬浠朵笅锛屽彲浠ョ嵅寰�70%鐨勫嘲鍊奸噺瀛愭晥鐜囥�傚櫔鑱叉脯(c猫)閲忚〃鏄庤┎鍣ㄤ欢鍏锋湁闈炲父浣庣殑鍣伈鐗规�э紙k~0.18锛�,閫欏��(g猫)鍊兼瘮浠nP鐐哄熀鏉愭枡鐨凙PD楂樺緢澶�锛岄’绀轰簡InAlAs绯诲垪鏉愭枡鍦ㄤ綆鍣伈鍣ㄤ欢鏂归潰鐨勫法澶ф經鍔�銆�
銆�銆�6锛夐倞鑰﹀悎鐨勬尝灏�(d菐o)绲�(ji茅)妲�(g貌u) (WG-APD)
銆�銆�鍙︿竴绋В姹哄惛鏀跺堡鍘氬害灏�(du矛)鍣ㄤ欢閫熺巼鍜岄噺瀛愭晥鐜囦笉鍚屽奖闊跨殑鐭涚浘鐨勬柟妗堟槸寮曞叆閭婅�﹀悎娉㈠皫(d菐o)绲�(ji茅)妲�(g貌u)銆傞�欑ó绲�(ji茅)妲�(g貌u)寰炲伌(c猫)闈㈤��(j矛n)鍏�锛屽洜?y脿n)妲差彆璜忛泹鑽汱(zh菐ng)锛屽鏄撶嵅寰楅珮閲忓瓙鏁堢巼锛屽悓鏅�(sh铆)锛屽惛鏀跺堡鍙互鍋氬緱寰堣杽锛岄檷浣庤級娴佸瓙寰楁浮瓒婃檪(sh铆)闁�銆傚洜姝�锛岄�欑ó绲�(ji茅)妲�(g貌u)瑙ｆ焙浜嗗付瀵拰鏁堢巼灏�(du矛)鍚告敹灞ゅ帤搴︾殑涓嶅悓渚濊炒闂�(gu膩n)绯伙紝鏈夋湜瀵�(sh铆)鐝�(xi脿n)楂橀�熺巼锛岄珮閲忓瓙鏁堢巼鐨凙PD銆俉G-APD鍦ㄥ伐钘濅笂杓僐CE APD绨�(ji菐n)鍠�锛岀渷鍘讳簡DBR鍙嶅皠閺＄殑寰�(f霉)闆滃埗鍌欏伐钘�銆傚洜姝�锛屽湪瀵�(sh铆)鐢ㄥ寲闋�(l菒ng)鍩熸洿鍏锋湁鍙鎬э紝閬╃敤浜庡叡骞抽潰鍏夐�ｆ帴銆�
銆�銆�鍦�5绲﹀嚭浜咺nGaAs/InAlAs SACM WG-APD绲�(ji茅)妲�(g貌u)绀烘剰鍦朳12]銆傝┎鍣ㄤ欢鏄敤MOCVD鏂规硶锛屽湪S-鎽婚洔鐨勶紙100锛塈nP瑗簳涓�锛岀敓闀�(zh菐ng)100 nm N鍨婭nP閬庢浮灞わ紝鍐嶇敓闀�(zh菐ng)涓�灞-鍨婭nAlAs灞�銆�150nm鐨勫�嶅灞ゆ槸閲囩敤闈炴晠鎰忔懟闆滅殑InAlAs鏉愭枡銆俍n鎽婚洔婵冨害鐐�2.1脳1017 cm-3 鐨�180 nm闆昏嵎灞ょ殑浣滅敤鏄(di脿o)鏁撮浕鍫�(ch菐ng)鍦ㄥ惛鏀跺堡鍜屽�嶅灞ょ殑鍒嗛厤锛屽惛鏀跺堡涓婁笅鍏╁伌(c猫)鍚勭敓闀�(zh菐ng)100 nm闈炴晠鎰忔懟闆滅殑InAlGaAs娉㈠皫(d菐o)灞ゃ�傞�欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠跺彲浠ュ(sh铆)鐝�(xi脿n)320 GHz鐨勫鐩�-甯跺绌嶅拰妤典綆鐨勫櫔鑱茬壒鎬э紙k=0.15锛�,鍏呭垎琛ㄧ従(xi脿n)浜嗗叾鍦ㄩ珮閫熺巼鍜岄暦(zh菐ng)璺濋洟鍏夐�氫俊闋�(l菒ng)鍩熺殑娼涘湪鎳�(y墨ng)鐢�銆�
銆�銆�WG-APD鐨勪富瑕佸晱椤屾槸钖勭殑鍚告敹灞ゅ帤搴︽笡灏戜簡鍏夎�﹀悎鏁堢巼锛岃�屼笖锛岀敱浜庡垏鐗囧伐钘濆拰鍦ㄩ��(j矛n)鍏夐潰鎶楀弽鑶滅殑褰遍熆锛屼娇閫欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠跺彲鑳芥�ц畩宸�銆傞�欎簺鍟忛鍙互閫氶亷绲�(ji茅)妲�(g貌u)鏀归��(j矛n)鑰岄�愭瑙ｆ焙銆�
銆�銆�鍦ㄦ尝闀�(zh菐ng)鐐�1.55 gm鐨勯暦(zh菐ng)娉㈤暦(zh菐ng)鍗�(q奴)鍩�锛岀敱浜庨嵑鍏夐浕鎺㈡脯(c猫)鍣ㄩ亣鍒版殫闆绘祦杓冨ぇ绛夊晱椤�锛屼汉鍊戜究杞�(zhu菐n)鍚戜娇鐢↖nP鍩烘潗鏂欍�傚湪InP瑗簳涓婄敓闀�(zh菐ng)InGaAsP锛岄�氶亷瑾�(di脿o)鏁村寲鍚堢墿绲勫垎鍚噺浣垮畠鑳藉湪1.2锝�1.6 gm娉㈤暦(zh菐ng)鑼冨湇鍏�(n猫i)宸ヤ綔銆傚湒1鎵�绀烘槸鏈�鏃╁嚭鐝�(xi脿n)鐨処nGaAsP/InP闆穿鍏夐浕鎺㈡脯(c猫)鍣ㄧ祼(ji茅)妲�(g貌u)鍜岃兘甯剁ず鎰忓湒LZII銆傚湪p锛� -InP涓婄敓闀�(zh菐ng)n-InGaAsP锛屽啀閫氶亷瑗簳娉ㄥ叆閶呭舰鎴怚nGaAsP鐨刾n绲�(ji茅)锛岃钃嬩竴灞-InP銆傞�欑ó瑗簳鍜岃〃闈㈠堡閮芥槸瀵甯朵綆闃诲堡绲�(ji茅)妲�(g貌u)娓涘皬浜嗕覆鑱�(li谩n)闆婚樆锛岄樆姝簡鍏夌敓杓夋祦瀛愬悜琛ㄩ潰鎿�(ku貌)鏁ｅ紩璧风殑寰�(f霉)鍚堛��
缍韩闆诲瓙閫氾紝闆诲瓙鐭ヨ瓨(sh铆)锛屼竴鏌ョ櫨閫�锛�
宸叉敹閷勮姊�162155鍊�(g猫)
IC鍨嬭櫉(h脿o)绱㈠紩锛� A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 0 1 2 3 4 5 6 7 8 9
©2025 缍韩闆诲瓙甯傚牬(ch菐ng)缍�(w菐ng)锛坵ww.dzsc.com锛夈��缍�(j墨ng)鐕熻ū鍙瓑绶ㄨ櫉(h脿o)锛�娴橞2-20050339 鐗堟瑠(qu谩n)鑱叉槑
鍗佸叚骞村皥娉ㄦ墦閫犲劒(y艒u)璩�(zh矛)闆诲瓙鍏冨櫒浠堕噰璩肩恫(w菐ng)銆両C浜ゆ槗骞宠嚭(t谩i)銆�
璨峰鏈嶅嫏(w霉)鐔辩窔锛�0571-85317666 | 璨峰鏈嶅嫏(w霉)閮≦Q锛�
璩ｅ鏈嶅嫏(w霉)鐔辩窔锛�0571-85317586 | 璩ｅ鏈嶅嫏(w霉)閮≦Q锛�
