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    灏�(du矛)浜� S-SBD 鑰岃█锛屽�栧欢灞ゆ績搴﹀�炲姞锛屽皫(d菐o)閫氬�撻檷娓涘��锛屽弽鍚戞紡娴佽畩澶э紝鐗瑰緛灏�(d菐o)閫氶浕闃昏畩灏�锛岀祼(ji茅)闆诲�硅畩澶�锛涘苟涓� S-SBD闅ㄨ憲澶栧欢灞ゅ帤搴﹀�炲��锛屽皫(d菐o)閫氬�撻檷璁婂��锛屽弽鍚戞紡娴佹笡灏忥紝鐗瑰緛灏�(d菐o)閫氶浕闃昏畩澶�锛岀祼(ji茅)闆诲�硅畩澶с�傜偤浜嗛仈(d谩)鍒板��(sh铆)闅� 45V銆�100V 鍙嶅悜鑰愬�撶�� SBD锛屾牴鎿�(j霉)浠ュ線绉戞妧宸ヤ綔缍�(j墨ng)椹�(y脿n)锛岃ō(sh猫)瑷�(j矛)鏅�(sh铆) SBD 鐨勫弽鍚戣�愬�撳垎鍒ラ��(d谩)鍒� 52V銆�120V 浠ヤ笂銆傛牴鎿�(j霉)涓婇潰涓夊��(g猫)寮忓瓙鍙�浠ュ垵姝ヤ及娓�(c猫)鍑哄叐绋�鍙嶅悜鑰愬�撶殑SBD 鐨勫�栧欢灞ゆ績搴﹀拰鍘氬害鑼冨湇銆�

    D-SBD 涓昏�佺壒榛�(di菐n)鏄�瀹冪殑澶栧欢灞ょ�� N澶栧欢灞ゅ拰 N 澶栧欢灞ゅ叐閮ㄥ垎绲勬垚锛孨 澶栧欢灞ゆ懟闆滄績搴﹂珮浜� N-澶栧欢灞�锛屼絾閬�(yu菐n)浣庝簬 N瑗�搴�銆傝垏 S-SBD 鐩告瘮锛屽�炲姞涓�灞ゆ績搴﹁純楂樼殑 N 澶栧欢灞や娇琛ㄩ潰 RESURF 姊濅欢鐧�(f膩)鐢熶竴瀹氱殑璁婂寲锛屼娇琛ㄩ潰闆诲牬(ch菐ng)鍒嗗竷鏀硅畩锛屽湪鎻愰珮绺卞悜鑰愬�撶殑鍚屾��(sh铆)闄嶄綆灏�(d菐o)閫氶浕闃�銆侱-SBD 鐨勭祼(ji茅)妲�(g貌u)鍙冩暩(sh霉)涓昏�佹湁鍣ㄤ欢闀�(zh菐ng)搴� L锛汵灞ら洔璩�(zh矛)婵冨害 Nd1锛屽帤搴� tepi1锛汵 澶栧欢灞ら洔璩�(zh矛)婵冨害 Nd2锛屽帤搴� tepi2锛涙哀鍖栧堡鍘氬害 tox锛涗繚璀�(h霉)鐠�(hu谩n)绲�(ji茅)娣� xj锛屽��搴� W锛屼綅缃� d銆�

    澶栧欢灞ゅ劒(y艒u)鍖�

    澶栧欢灞ゅ帤搴�

    鐣�(d膩ng)鍣ㄤ欢灏哄�哥偤瀹氬�兼檪(sh铆)锛岀劇(w煤)璜栬倴鐗瑰熀鍕�(sh矛)澹橀珮搴� 肖sbh鏄� 0.64eV 閭勬槸 0.78eV D-SBD锛岄毃钁� N-澶栧欢灞ょ殑鍘氬害璁婂ぇ锛孌-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁婂ぇ锛涚浉鍙嶅湴锛岄毃钁� N 澶栧欢灞ょ殑鍘氬害璁婂ぇ锛孌-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁婂皬銆�

    鐣�(d膩ng)tepi1鑸噒epi2涔嬪拰鍙婂櫒浠跺昂瀵哥偤瀹氬�兼檪(sh铆)锛屽皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤0.64eV D-SBD锛屽皫(d菐o)閫氬�撻檷闅ㄨ�� N-澶栧欢灞ょ殑鍘氬害澧炲姞鐣ユ湁澧炲姞锛涚暥(d膩ng) tepi12渭m锛岄浂鍋忔檪(sh铆)绲�(ji茅)闆诲�瑰熀鏈�涓嶉毃 tepi1鑸� tepi2璁婂寲銆傚皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD锛屽皫(d菐o)閫氬�撻檷闅ㄨ�� N-澶栧欢灞ょ殑鍘氬害澧炲姞鐣ユ湁澧炲姞锛涚暥(d膩ng) tepi14渭m锛岄浂鍋忔檪(sh铆)绲�(ji茅)闆诲�瑰熀鏈�涓嶉毃 tepi1鑸� tepi2璁婂寲銆傛墍浠ュ湪婊胯冻鑰愬�撴儏娉佷笅鐛插緱鐩￠噺灏忕壒寰佸��(d菐o)閫氶浕闃诲拰灏�(d菐o)閫氬�撻檷鑸囩��(ji茅)闆诲��锛屾湰鏂囧皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.64eV D-SBD 鐨勫�栧欢灞ゅ帤搴﹂��?銆傜熬o(w煤)璜栦换浣曞櫒浠跺昂瀵� tepi1=2渭m锛宼epi2=1渭m锛涘皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD 鐨勫�栧欢灞ゅ帤搴﹂��?銆傜熬o(w煤)璜栦换浣曞櫒浠跺昂瀵� tepi1=1渭m锛宼epi2=9渭m銆�

    澶栧欢灞ゆ績搴�

    鐣�(d膩ng)鍏朵粬绲�(ji茅)妲�(g貌u)鍙冩暩(sh霉)鐐哄畾鍊兼檪(sh铆)锛屽皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.64eV D-SBD 闅ㄨ憲 N-澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁�??锛涘皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD 闅ㄨ憲 N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撹畩灏�锛岀劧鑰岀壒寰佸皫(d菐o)閫氶浕闃诲墖鐣ユ湁澧炲ぇ銆�

    鐣�(d膩ng)N澶栧欢灞ゆ績搴﹀強鍣ㄤ欢灏哄�哥偤瀹氬�兼檪(sh铆)锛屽皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤0.64eV D-SBD 闅ㄨ憲 N澶栧欢灞ゆ績搴﹁畩澶�锛屽皫(d菐o)閫氬�撻檷璁婂皬锛岄浂鍋忔��(sh铆)绲�(ji茅)闆诲�圭暐鏈夊�炲姞銆傚皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD锛岀暥(d膩ng) L=1778渭m 鏅�(sh铆)闅ㄨ憲 N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屽皫(d菐o)閫氬�撻檷娓�??锛涚暥(d膩ng) L=2040渭m 鍜� L=2290渭m 鏅�(sh铆)闅ㄨ憲 N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屽皫(d菐o)閫氬�撻檷璁婂��锛涗絾鏄�灏�(d菐o)閫氬�撻檷闅ㄨ憲澶栧欢灞ゆ績搴﹁畩鍖栦竴鍊�(g猫)鏁�(sh霉)閲忕礆(j铆)鍍呰畩鍖栫磩鐐� 0.004V銆傜劧鑰岃倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD 闅ㄨ憲 N-澶栧欢灞ょ殑婵冨害璁婂ぇ锛岄浂鍋忔檪(sh铆)绲�(ji茅)闆诲�规槑椤�澧炲姞銆傛墍浠ュ湪婊胯冻鑰愬�撹�佹眰鎯呮硜涓嬩互闄嶄綆鐗瑰緛灏�(d菐o)閫氶浕闃�銆佸皫(d菐o)閫氬�撻檷鑸囩��(ji茅)闆诲�规姌琛�锛屾湰鏂囧皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.64eV D-SBD 鐨� N-澶栧欢灞ょ殑婵冨害閬�?銆傚瘨?d膩ng) L=1778渭m 鏅�(sh铆) Nd1=6.1脳10cm锛涚暥(d膩ng) L=2040渭m 鍜孡=2290渭m 鏅�(sh铆) Nd1=5脳10cm銆傚皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD 鐨� N-澶栧欢灞ょ殑婵冨害閬�?銆傜熬o(w煤)璜栦换浣曞櫒浠跺昂瀵� Nd1=1脳10cm銆�

    D-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃婚毃钁� N 澶栧欢灞ゆ績搴﹁畩鍖�銆傜暥(d膩ng)鍏朵粬绲�(ji茅)妲�(g貌u)鍙冩暩(sh霉)鐐哄畾鍊兼檪(sh铆)锛屽皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.64eV D-SBD 闅ㄨ憲 N 澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁婂皬锛涘皪(du矛)浜庤倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾偤 0.78eV D-SBD 闅ㄨ憲 N 澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撹畩灏忥紝鐒惰�岀壒寰佸皫(d菐o)閫氶浕闃诲墖鐣ユ湁澧炲ぇ銆�

    鐣�(d膩ng) N-澶栧欢灞ゆ績搴﹀強鍣ㄤ欢灏哄�哥偤瀹氬�兼檪(sh铆)锛岀劇(w煤)璜栬倴鐗瑰熀鍕�(sh矛)澹橀珮搴� 肖sbh 26 鏄� 0.64eV 閭勬槸 0.78eV D-SBD锛岄毃钁� N 澶栧欢灞ゆ績搴﹁畩澶�锛屽皫(d菐o)閫氬�撻檷璁婂��锛岄浂鍋忔檪(sh铆)绲�(ji茅)闆诲�圭暐鏈夊�炲姞銆�

    绲�(ji茅)绲傜��瑷�(sh猫)瑷�(j矛)

    SBD 鍦ㄨ倴鐗瑰熀鎺ヨЦ鐨勯倞绶ｉ浕鍫�(ch菐ng)绶氶泦涓�锛岄浕鍫�(ch菐ng)寮�(qi谩ng)搴﹀�炲姞灏�(d菐o)鑷村嫝(sh矛)澹橀檷浣�锛屽洜闅ч亾鏁堟噳(y墨ng)鏄庨’澧炲姞浜嗗弽鍚戞紡闆绘祦锛屽弽鍚戞埅姝㈢壒鎬ц畩杌燂紝浣� SBD 鐨勮�愬�撻��(yu菐n)浣庝簬骞抽潰绲�(ji茅)銆傜偤绶╄В閭婄罚闆诲牬(ch菐ng)绶氶泦涓�鏁堟��(y墨ng)锛岄�氬父鏈夊叐绋�鎶�琛�(sh霉)璺�寰戯��(1)鏀瑰杽鑰楃洝灞ゆ洸鐜�锛屼娇琛ㄩ潰鑰楃洝灞ゆ┇鍚戞摯(ku貌)灞曞埌鍫�(ch菐ng)鏉块倞绶ｄ箣澶栵紱(2)浣跨敤灞�閮ㄦ哀鍖�(local oxidation of silicon锛孡OCOS)宸ヨ棟锛屽湪鑲栫壒鍩烘帴瑙搁倞绶ｈ檿鐢熸垚浜屾哀鍖栫�呭��銆傜祼(ji茅)绲傜��澶ц嚧鍒嗛�炲�傚湒 3.9 鎵�绀�锛屽叾涓�淇濊��(h霉)鐠�(hu谩n)鐗瑰垾閬╃敤绺卞悜鍣ㄤ欢锛岃ō(sh猫)瑷�(j矛)闂�(gu膩n)閸垫槸鍎�(y艒u)鍖栫挵(hu谩n)娣卞害鑸囧��(g猫)鏁�(sh霉)鍜岀挵(hu谩n)闁撹窛浣垮緱涓荤祼(ji茅)鍜岀挵(hu谩n)绲�(ji茅)鍚屾檪(sh铆)閬�(d谩)鍒拌嚚鐣屾搳绌块浕鍫�(ch菐ng)锛屽彲浣垮櫒浠惰�愬�撳��銆傞爤鎸囧嚭鐠�(hu谩n)鏁�(sh霉)澧炲�氾紝鍣ㄤ欢鑰愬�撻潪绶氭�ф彁楂�銆佽嚜韬�闈㈢�嶈秺澶у拰浠跨湡鏁�(sh霉)鎿�(j霉)涔熸�ュ妵鍦板�炲姞銆�

    纭呭熀鑲栫壒鍩哄嫝(sh矛)澹樹簩妤电�￠潨鎱�(t脿i)鐗规��

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