鎮ㄥソ锛屾杩庝締鍒扮董搴浕瀛愬競鍫寸恫(w菐ng)
鐧婚寗 | 鍏嶈不(f猫i)娉ㄥ唺
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銆�銆�MEMS 闄�铻哄剙(gyroscope)鐨勫伐浣滃師鐞嗗偝绲�(t菕ng)鐨勯檧铻哄剙涓昏鏄埄鐢ㄨ鍕曢噺瀹堟亽鍘熺悊, 鍥犳瀹冧富瑕佹槸涓�鍊嬩笉鍋滆綁(zhu菐n)鍕曠殑鐗╅珨, 瀹冪殑杞�(zhu菐n)杌告寚 鍚戜笉闅ㄦ壙杓夊畠鐨勬敮鏋剁殑鏃嬭綁(zhu菐n)鑰岃畩鍖�.
銆�銆�浣嗘槸 MEMS 闄�铻哄剙(gyroscope)鐨勫伐浣滃師鐞嗕笉鏄�欐ǎ鐨�,鍥�?y脿n)姗愵�叉ⅵ顣綜(j墨)姊版妧琛�(sh霉)鍦ㄧ鐗囪ク搴� 涓婂姞宸ュ嚭涓�鍊嬪彲杞�(zhu菐n)鍕曠殑绲�(ji茅)妲�(g貌u)鍙笉鏄竴浠跺鏄撶殑浜�.MEMS 闄�铻哄剙鍒╃敤绉戦噷濂у埄鍔涒�斺�旀棆杞�(zhu菐n) 鐗╅珨鍦ㄦ湁寰戝悜閬�(y霉n)鍕曟檪鎵�鍙楀埌鐨勫垏鍚戝姏. 涓嬮潰鏄皫(d菐o)鍑虹閲屽ェ鍒╁姏鐨勬柟娉�. 鏈夊姏瀛�(xu茅)鐭ヨ瓨鐨勮畝鑰呮噳(y墨ng) 瑭蹭笉闆ｇ悊瑙�.
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銆�銆�濡傛灉鐗╅珨鍦ㄥ湏鐩や笂娌掓湁寰戝悜閬�(y霉n)鍕�,绉戦噷濂у埄鍔涘氨涓嶆渻鐢�(ch菐n)鐢�.鍥犳,鍦� MEMS 闄�铻哄剙鐨勮ō(sh猫)瑷�(j矛) 涓�,閫欏�嬬墿楂旇椹�(q奴)鍕�,涓嶅仠鍦颁締鍥炲仛寰戝悜閬�(y霉n)鍕曟垨鑰呴渿钑�,鑸囨灏嶆噳(y墨ng)鐨勭閲屽ェ鍒╁姏灏辨槸涓嶅仠鍦� 鍦ㄦ┇鍚戜締鍥炶畩鍖�,骞舵湁鍙兘浣跨墿楂斿湪姗悜浣滃井灏忛渿钑�,鐩镐綅姝ｅソ鑸囬﹨(q奴)鍕曞姏宸� 90 搴�.
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銆�銆�MEMS闄�铻哄剙鏄埄鐢� coriolis 瀹氱悊锛屽皣鏃嬭綁(zhu菐n)鐗╅珨鐨勮閫熷害杞�(zhu菐n)鎻涙垚鑸囪閫熷害鎴愭姣旂殑鐩存祦闆诲淇¤櫉锛屽叾鏍稿績閮ㄤ欢閫氶亷鎽婚洔鎶�琛�(sh霉)銆佸厜鍒绘妧琛�(sh霉)銆佽厫铦曟妧琛�(sh霉)銆丩IGA鎶�琛�(sh霉)銆佸皝瑁濇妧琛�(sh霉)绛夋壒閲忕敓鐢�(ch菐n)鐨勶紝瀹冧富瑕佺壒榛�(di菐n)鏄�
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銆�銆�MEMS 闄�铻哄剙(gyroscope)鐨勮ō(sh猫)瑷�(j矛)鍜屽伐浣滃師鐞嗗彲鑳藉悇绋悇妯�,浣嗘槸鍏枊鐨� MEMS 闄�铻哄剙鍧� 閲囩敤鎸嫊鐗╅珨鍌虫劅瑙掗�熷害鐨勬蹇�. 鍒╃敤鎸嫊渚嗚獦灏�(d菐o)鍜屾帰娓閲屽ェ鍒╁姏鑰岃ō(sh猫)瑷�(j矛)鐨� MEMS 闄�铻哄剙 娌掓湁鏃嬭綁(zhu菐n)閮ㄤ欢, 涓嶉渶瑕佽桓鎵�, 宸茶璀夋槑鍙互鐢ㄥ井姗�(j墨)姊板姞宸ユ妧琛�(sh霉)澶ф壒閲忕敓鐢�(ch菐n). 绲曞ぇ澶氭暩(sh霉) MEMS 闄�铻哄剙渚濊炒浜庣敱鐩镐簰姝ｄ氦鐨勬尟鍕曞拰杞�(zhu菐n)鍕曞紩璧风殑浜よ畩绉戦噷濂у埄鍔�. 鎸嫊鐗╅珨琚煍杌熺殑褰堟�х祼(ji茅)妲�(g貌u) 鎳告帥鍦ㄥ熀搴曚箣涓�. 鏁撮珨鍕曞姏瀛�(xu茅)绯荤当(t菕ng)鏄簩缍綀鎬ч樆灏肩郴绲�(t菕ng), 鍦ㄩ�欏�嬬郴绲�(t菕ng)涓尟鍕曞拰杞�(zhu菐n)鍕曡獦灏�(d菐o)鐨勭 閲屽ェ鍒╁姏鎶婃姣斾簬瑙掗�熷害鐨勮兘閲忚綁(zhu菐n)绉诲埌鍌虫劅妯″紡.
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