銆�銆�A.瀛斿緫娓�瑭﹀剙鐪熺┖绯荤当(t菕ng)

銆�銆�1)鐨勪竴楂斿寲闆嗚�濆紡绠¤矾绯荤��(t菕ng),閲囩敤閫�(j矛n)鍙ｉ泦瑁濈�¤��,椤�钁楁笡灏戠�¤矾閫ｆ帴榛�,澶уぇ闄嶄綆婕忔埃鐜�,鎻愰珮妤甸檺鐪熺┖搴�.

銆�銆�2)妯″�婂寲绲�(ji茅)妲�(g貌u)瑷�(sh猫)瑷�,涓�楂斿紡闆嗚�濈�¤矾,闇�浜哄伐閫�(j矛n)琛岄�ｆ帴鐨勯儴浠跺皯,鏈夊埄浜庢牴鎿�(j霉)鐢ㄦ埗闇�姹傛寜闇�閰嶇疆鍙婂悗鏈熷姛鑳芥摯(ku貌)灞�,鏈夊埄浜庣董淇�鏇存��.

銆�銆�3)閲囩敤鐪熺┖娉�,鍣�闊冲��,閬�(y霉n)琛岀┅(w臎n)瀹�,闃叉补杩斿姛鑳藉崜瓒�,妤甸檺鐪熺┖搴﹂珮,鍙�閬�(d谩)4x10锛�2Pa (3x10锛�4Torr)

銆�銆�B.瀛斿緫娓�瑭﹀剙)鎺у埗绯荤当(t菕ng)

銆�銆�1)閲囩敤寤ｆ硾鎳�(y墨ng)鐢ㄤ簬宸ユキ(y猫)鎺у埗绯荤当(t菕ng)涓�鐨勫彲绶ㄧ▼鎺у埗鍣ㄩ浕纾侀枼鎺у埗绯荤��(t菕ng),鎶楀共鎿捐兘鍔涘挤(qi谩ng),绌�(w臎n)瀹氭�уぇ澶ф彁楂�,瀹夎�濆強鎷嗗嵏閮介潪甯告柟渚�;

銆�銆�2)娓�瑭︾郴绲�(t菕ng)绠¤矾鍜屾ǎ鍝佽檿鐞嗙�¤矾鍒嗛洟绲�(ji茅)妲�(g貌u),鏈夋晥闃叉�㈡ǎ鍝佽檿鐞嗛亷绋嬩腑鐢�(ch菐n)鐢熺殑闆滆唱(zh矛)灏嶆脯瑭︾�¤矾鐨勬薄鏌�.

銆�銆�C.瀛斿緫娓�瑭﹀剙鎻愰珮娓�瑭︾簿搴︽帾鏂�

銆�銆�1)閲囩敤楂樼簿搴︾�呰杽鑶滃�撳姏鍌虫劅鍣�,澹撳姏娓�閲忕簿搴︾偤鐩告��(y墨ng)璁�鏁�(sh霉)鐨�0.15锛�,閬�(yu菐n)閬�(yu菐n)鍎�(y艒u)浜�0.15锛呯殑鍏ㄩ噺绋嬬簿搴�(FS)鍌虫劅鍣�;

銆�銆�2)閲囩敤0锛�10Torr鍜�0锛�2000Torr闆欏�撳姏鍌虫劅鍣�,灏嶆脯瑭﹁寖鍦嶅収(n猫i)鐨勫�撳姏閲囩敤鍒嗘�垫脯閲�,澶уぇ闄嶄綆浜嗕綆鐪熺┖涓嬬殑娓�閲忚�ゅ樊,0锛�10Torr鐨勭�呰杽鑶滃�撳姏鍌虫劅鍣ㄧ簿搴﹂仩(yu菐n)楂樹簬鐩稿悓閲忕▼鐨勭毊鎷夊凹闆婚樆鐪熺┖瑷�(涓�鑸�瑾ゅ樊鐐�10%-15锛�);

銆�銆�3)涓�楂斿寲闆嗚�濆紡绠¤矾绯荤��(t菕ng),閲囩敤閫�(j矛n)鍙ｉ泦瑁濈�¤��,椤�钁楁笡灏戠�¤矾閫ｆ帴榛�,澶уぇ娓涘皯姝婚珨绌嶇┖闁�,鏈夊埄浜庨檷浣庢脯閲忚�ゅ��;

銆�銆�4)姝ラ��(j矛n)寮忔恫姘�闈㈡帶鍒剁郴绲�(t菕ng),纰轰繚娓�瑭﹀叏绋嬫恫姘�闈㈢浉灏嶆ǎ鍝佺�′綅缃�淇濇寔涓嶈畩,寰瑰簳娑堥櫎鍥犳�婚珨绌嶈畩鍖栧紩鍏ョ殑娓�閲忚�ゅ��;

銆�銆�5)鐛ㄧ壒瑷�(sh猫)瑷堢殑鎶芥埃鍙婇��(j矛n)姘ｆ帶鍒剁郴绲�(t菕ng),鏈夋晥闃叉�㈡ǎ鍝佹娊鐪熺┖鍜岄��(j矛n)姘ｉ亷绋嬩腑鐨勯�涙��,纰轰繚娓�瑭︽埃璺�鐨勬竻娼斿拰妯ｅ搧璩�(zh矛)閲忕劇鎼嶅け,淇濊��(h霉)楂樼簿搴﹀�撳姏鍌虫劅鍣ㄥ厤鍙楀�撳姏宸ㄨ畩鍙�鑳藉��(d菐o)鑷寸殑闆堕粸鍜岀窔鎬ф紓绉�.

銆�銆�D.瀛斿緫娓�瑭﹀剙鏁�(sh霉)鎿�(j霉)閲囬泦鍙婅檿鐞�

銆�銆�1)閲囩敤楂樼簿搴﹀強楂橀泦鎴愬害鏁�(sh霉)鎿�(j霉)閲囬泦妯″��,閫ｆ帴鏂逛究,瑾ゅ樊灏�,鎶楀共鎿捐兘鍔�;閲囩敤妤�(y猫)鐣屾��(bi膩o)婧�(zh菙n)鐨勯�氳▕妯″紡,鏈夊埄浜庤ō(sh猫)鍌欐摯(ku貌)灞曞拰浜掗��,鍙�鏂逛究杞�(zhu菐n)鎻涚偤鎵�闇�鐨凴S232鍜孶SB閫氳▕妯″紡;

銆�銆�2)澶氱ó鐞嗚珫瑷堢畻妯″瀷鏁�(sh霉)鎿�(j霉)鍒嗘瀽,鐐虹敤鎴舵彁渚涘叏鏂逛綅鐨勬潗鏂欏垎鏋愭柟妗�;寮�(qi谩ng)澶х殑娓�瑭︽��(sh霉)鎿�(j霉)姝告獢淇濆瓨,鏌ヨ�㈢郴绲�(t菕ng),鏈夊埄浜庣敤鎴舵暩(sh霉)鎿�(j霉)绠＄悊.

銆�銆�娓�瑭︽柟娉曞強鍔熻��:姘�鍚搁檮鐪熺┖瀹归噺娉�(鐪熺┖闈滄厠(t脿i)娉�),鍚搁檮鍙婅劔闄勭瓑婧�绶氭脯瀹�,BET娉曟瘮琛ㄩ潰绌嶆脯瀹�(鍠�榛炲強澶氶��),Langmuir娉曟瘮琛ㄩ潰绌嶆脯瀹�,骞冲潎绮掑緫浼扮畻,妯ｅ搧鐪熷瘑搴︽脯瀹�,t锛峱lot鍦栨硶澶栨瘮琛ㄩ潰绌嶆脯瀹�锛�

銆�銆�娓�瀹氳寖鍦�:0.01(銕�/g)--鑷崇劇涓婇檺(姣旇〃闈㈢��)锛�

銆�銆�娓�閲忕簿搴�:閲嶅京(f霉)鎬ц�ゅ樊灏忎��1.5[%]锛�

銆�銆�鐪熺┖绯荤当(t菕ng):V-Sorb鐨勯泦瑁濆紡绠¤矾鍙婇浕纾侀枼鎺у埗绯荤当(t菕ng),澶уぇ娓涘皬绠¤矾姝婚珨绌嶇┖闁�,鎻愰珮妾㈡脯鍚搁檮姘ｉ珨寰�閲忚畩鍖栫殑闈堟晱搴�,寰炶�屾彁楂樻瘮琛ㄩ潰绌嶆脯瀹氱殑鍒嗚鲸鐜�;鍚屾檪闆嗚�濆紡绠¤矾娓涘皯浜嗛�ｆ帴榛�,澶уぇ鎻愰珮瀵嗗皝鎬у拰鍎�鍣ㄤ娇鐢ㄥ＝鍛�锛�

銆�銆�娑蹭綅鎺у埗:V-Sorb鐨勬恫姘�闈㈡帶鍒剁郴绲�(t菕ng),纰轰繚娓�瑭﹀叏绋嬫恫姘�闈㈢浉灏嶆ǎ鍝佺�′綅缃�淇濇寔涓嶈畩,寰瑰簳娑堥櫎鍥犳�婚珨绌嶈畩鍖栧紩鍏ョ殑娓�閲忚�ゅ��锛�

銆�銆�鎺у埗绯荤当(t菕ng):閲囩敤鍙�绶ㄧ▼鎺у埗鍣ㄩ浕纾侀枼鎺у埗绯荤��(t菕ng),楂橀泦鎴愬害鍜屾姉骞叉摼鑳藉姏,鎻愰珮鍎�鍣ㄧ┅(w臎n)瀹氭�у拰浣跨敤澹藉懡锛�

銆�銆�妯ｅ搧鏁�(sh霉)閲�:鍚屾檪閫�(j矛n)琛�2鍊嬫ǎ鍝佸垎鏋愬拰2鍊嬫ǎ鍝佽劔姘ｈ檿鐞�锛�

銆�銆�澹撳姏娓�閲�:閲囩敤澹撳姏鍒嗘�垫脯閲忕殑閫�(j矛n)鍙ｉ洐澹撳姏鍌虫劅鍣�,椤�钁楁彁楂樹�� P/Po榛炰笅娓�瑭︾簿搴�,0-1000Torr(0-133Kpa),0-10Torr(0-1.33Kpa)(鍙�閬�)

銆�銆�澹撳姏绮惧害:閫�(j矛n)鍙ｇ�呰杽鑶滃�撳姏鍌虫劅鍣�,绮惧害閬�(d谩)瀵﹂殯璁�鏁�(sh霉)鐨�0.15锛�,鍎�(y艒u)浜庡叏閲忕▼鐨�0.15锛�,閬�(yu菐n)楂樹簬鐨�鎷夊凹闆婚樆鐪熺┖瑷堢簿搴�(涓�鑸�瑾ゅ樊鐐�10[%]-15锛�)锛�

銆�銆�鍒嗗�撹寖鍦�:P/Po 婧�(zh菙n)纰哄彲鎺ц寖鍦嶉仈(d谩)5x10锛�6锛�0.995锛�

銆�銆�妤甸檺鐪熺┖:4x10锛�2Pa(3x10锛�4Torr)锛�

銆�銆�妯ｅ搧椤炲瀷:绮夋湯,椤嗙矑,绾栫董鍙婄墖鐙�鏉愭枡绛�锛�

銆�銆�娓�瑭︽埃楂�:楂樼磾N2姘�(99.999[%])鎴栧叾瀹�(鎸夐渶閬告搰濡侫r,Kr)锛�

銆�銆�鏁�(sh霉)鎿�(j霉)閲囬泦:楂樼簿搴﹀強楂橀泦鎴愬害鏁�(sh霉)鎿�(j霉)閲囬泦妯″��,瑾ゅ樊灏�,鎶楀共鎿捐兘鍔涘挤(qi谩ng)锛�

銆�銆�鏁�(sh霉)鎿�(j霉)铏曠悊:Windows鍏煎�规��(sh霉)鎿�(j霉)铏曠悊杌熶欢,鍔熻兘瀹屽杽,鎿嶄綔绨″柈,澶氱ó妯″紡鏁�(sh霉)鎿�(j霉)鍒嗘瀽,鍦栧舰鍖栨暩(sh霉)鎿�(j霉)鍒嗘瀽绲�(ji茅)鏋滃牨琛ㄣ��

銆�銆�鎳�(y墨ng)鐢ㄩ牁(l菒ng)鍩�:鍚搁檮鍔�(濡傛椿鎬х⒊,纭呰啝,娲绘�ф哀鍖栭媮,鍒嗗瓙绡�,娲绘�х偔,纭呴吀閳�,娴锋场鐭�,娌哥煶绛�);闄剁摲鍘熸潗鏂�(濡傛哀鍖栭媮,姘у寲閶�,纭呴吀楣�,姘�鍖栭��,浜屾哀鍖栫��,姘у寲閲�,姘�鍖栫��,鐭宠嫳,纰冲寲纭呯瓑);姗″�戞潗鏂欒��(b菙)寮�(qi谩ng)鍔�(濡傜偔榛�,鐧界⒊榛�,绱嶇背纰抽吀閳�,纰抽粦,鐧界偔榛戠瓑);闆绘睜鏉愭枡(濡傞埛閰搁嫲,閷抽吀閶�,鐭冲ⅷ,閹抽埛閰搁嫲,姘у寲閳�,纾烽吀閻甸嫲,閳﹂吀閶�,涓夊厓绱�,涓夊厓绱犳潗鏂�,鑱氬悎鐗�,鑱氬悎鐗╂潗鏂�,鑱氬悎鐗╅浕姹犳潗鏂�,鍫块尦鏉愭枡,閶伴洟瀛愭潗鏂�,閶伴尦鏉愭枡,鍫挎�ф潗鏂�,閶呴尦鏉愭枡,鐭宠嫳绮�,閹傞尦鏉愭枡,纰虫�ф潗鏂�,閶呯┖鏉愭枡,閶呮睘鏉愭枡,涔欑倲榛�,閹虫矮鏉愭枡,閹抽帢鏉愭枡,闅旇啘,娲绘�х墿璩�,娣诲姞鍔�,灏�(d菐o)闆诲姂,绶╄潟鍔�,閷崇矇,闆昏В浜屾哀鍖栭尦,鐭冲ⅷ绮�,姘�姘у寲浜為��,娉℃搏閹�,鏀规�х煶澧ㄦ潗鏂�,姝ｆサ娲绘�х墿璩�(zh矛),璨�(f霉)妤垫椿鎬х墿璩�(zh矛),閶呯矇绛�);閲戝爆姘у寲鐗�(濡傛哀鍖栭媴,姘у寲閳�,姘у寲閳�,姘у寲閹�,姘у寲閶�,姘у寲閻�,姘у寲閵呯瓑);纾佹�х矇鏈�鏉愭��(濡傚洓姘у寲涓夐惖,閻垫哀楂�,姘у寲浜為惖绛�);绱嶇背閲戝爆鏉愭枡(濡傜磵绫抽妧绮�,閻电矇,閵呯矇,閹㈢矇,閹崇矇,閶佺矇,閳风矇绛�);鐠�(hu谩n)淇濊�屾��(y猫)(濡傞�忓～鏂�,鏌卞～鏂�,鐒℃��(j墨)椤忔枡,纰抽吀閳�,姘у寲纭�,绀︾墿绮�,娌夌�嶇��,鎳告诞鐗╃瓑);鐒℃��(j墨)绮夐珨鏉愭枡(濡傛哀鍖栭垿,閳︾櫧绮�,浜屾哀鍖栭垿绛�);绱嶇背鏉愭枡(濡傜磵绫崇矇楂旀潗鏂�,绱嶇背闄剁摲鏉愭枡绛�);绋�鍦�,鐓ょ偔,姘存偿,鍎茶兘鏉愭枡,鍌�鍖栧��(纭呰椈鍦�),鍑堝寲鍔�,鍔╂烤鍔�,鐧�(f膩)鍏夌█鍦熺矇鏈�鏉愭��,绮夐珨鏉愭枡,绮夋湯鏉愭枡,瓒呯窗(x矛)绾栫董,澶氬瓟绻旂墿,寰�(f霉)鍚堟潗鏂欑瓑绮夐珨鍜岄�嗙矑鏉愭枡鐨勬瘮琛ㄩ潰绌嶅強瀛斿緫鐨勬�㈡脯鍒嗘瀽,寤ｆ硾閬╃敤浜庨珮鏍″強绉戠爺闄㈡墍鏉愭枡鐮旂┒鍜岀矇楂旀潗鏂欑敓鐢�(ch菐n)浼佹キ(y猫)鐢�(ch菐n)鍝佽唱(zh矛)閲忕洠(ji膩n)鎺�.