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    纰冲寲纭呮棭鍦� 1842 骞村氨琚�鐧�(f膩)鐝�(xi脿n)浜�锛屼絾鍥犲叾鍒跺倷鏅�(sh铆)鐨勫伐钘濋洠搴﹀ぇ锛屽苟涓斿櫒浠剁殑鎴愬搧鐜囦綆锛屽皫(d菐o)鑷翠簡鍍�(ji脿)鏍艰純楂�锛岄�欏奖闊夸簡瀹冪殑鎳�(y墨ng)鐢ㄣ�傜洿鍒� 1955 骞�锛岀敓闀�(zh菐ng)楂樺搧璩�(zh矛)纰冲寲纭呯殑鏂规硶鍑虹従(xi脿n)淇冮��(j矛n)浜� SiC 鏉愭枡鐨勭櫦(f膩)灞�锛屽湪鑸�澶┿�佽埅绌�銆侀浄閬�(d谩)鍜屾牳鑳介枊鐧�(f膩)鐨勯牁(l菒ng)鍩熷緱鍒版噳(y墨ng)鐢ㄣ��1987 骞�锛屽晢妤�(y猫)鍖栫敓鐢�(ch菐n)鐨� SiC 閫�(j矛n)鍏ュ競鍫�(ch菐ng)锛屽苟鎳�(y墨ng)鐢ㄤ簬鐭虫补鍦�?z茅)宀�鐩�纰у仴鈷嗗喚l绌鸿��(di脿o)鐨勯枊鐧�(f膩)銆佸钩鏉块浕瑕栫殑鎳�(y墨ng)鐢ㄤ互鍙婂お闄借兘璁婃彌鐨勯牁(l菒ng)鍩熴��

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    SiC 鑲栫壒鍩哄嫝(sh矛)澹樹簩妤电�″�� 1985 骞村晱涓�锛屾槸 Yoshida 鍒朵綔鍦� 3C-SiC 涓婄殑锛屽畠鐨勮倴鐗瑰熀鍕�(sh矛)澹橀珮搴︾敤闆诲�规��(c猫)閲忔槸 1.15 (卤0.15) eV锛岀敤鍏夐熆鎳�(y墨ng)娓�(c猫)閲忔槸 1.11 (卤0.03) eV锛屽畠鐨勬搳绌块浕澹撳彧鏈�8 V锛屽彧6H-SiC鑲栫壒鍩轰簩妤电�＄殑鎿婄┛闆诲�撳ぇ绱勬湁200 V锛屽畠鏄�鐢� Glover. G. H 鍫�(b脿o)閬撳嚭渚嗙殑銆侭hatnagar 鍫�(b脿o)閬撲簡鍊�(g猫)楂樺�� 400 V 6H-SiC 鑲栫壒鍩哄嫝(sh矛)澹樹簩妤电�� 锛岄�欏��(g猫)浜屾サ绠℃湁浣庨�氭厠(t脿i)澹撻檷锛�1 V锛�锛屾矑鏈夊弽鍚戞仮寰�(f霉)闆绘祦銆傞毃钁楃⒊鍖栫�呭柈鏅�銆佸�栧欢璩�(zh矛)閲忓強纰冲寲纭呭伐钘濇按骞充笉鏂峰湴涓嶆柗鎻愰珮锛岃秺渚嗚秺澶氭�ц兘鍎�(y艒u)瓒婄殑纰冲寲纭呰倴鐗瑰熀浜屾サ绠¤��鍫�(b脿o)閬�銆�1993 骞村牨(b脿o)閬撲簡鍙�鎿婄┛闆诲�撹秴閬� 1000V鐨勭⒊鍖栫�呰倴鐗瑰熀浜屾サ绠�锛岃┎鍣ㄤ欢鐨勮倴鐗瑰熀鎺ヨЦ閲戝爆鏄� Pd锛屽畠閲囩敤 N 鍨嬪�栧欢鐨勬懟闆滄績搴�1脳10cm锛屽帤搴︽槸 10渭m銆傞珮璩�(zh矛)閲忕殑4H-SiC鍠�鏅剁殑鍦� 1995 骞村乏鍙冲嚭鐝�(xi脿n)锛屽畠姣�6H-SiC鐨勯浕瀛愰伔绉荤巼瑕侀珮锛岃嚚鐣屾搳绌块浕鍫�(ch菐ng)瑕佸ぇ寰堝�氾紝閫欎娇寰椾汉鍊戞洿鍌惧悜浜庣爺绌�4H-SiC鐨勮倴鐗瑰熀浜屾サ绠�銆侼i/4H-SiC 鑲栫壒鍩轰簩妤电�℃槸鍦� 1995骞存�¤��鍫�(b脿o)閬撶殑锛屽畠閲囩敤鐨勫�栧欢鎽婚洔婵冨害鐐� 1脳1016 cm锛屽帤搴� 10 渭m锛屾搳绌块浕澹撻仈(d谩)鍒� 1000 V锛屽湪 100A/cm 鏅�(sh铆)姝ｅ悜澹撻檷寰堜綆鐐� 1.06 V锛屽�ゆ韩涓嬫瘮灏�(d菐o)閫氶浕闃诲緢浣庯紝鐐� 2脳10 ?路cm銆�2005 骞� Tomonori Nakamura 绛変汉鐢� Mo 鍋氳倴鐗瑰熀鎺ヨЦ锛屾搳绌块浕澹撶偤 4.15 KV锛屾瘮鎺ヨЦ闆婚樆鐐� 9.07 m?路cm锛屽苟涓旈毃钁楅��鐏�婧�搴︾殑鍗囬珮锛岃┎鑲栫壒鍩轰簩妤电�＄殑鍕�(sh矛)澹橀珮搴︿篃鍗囬珮锛屽湪 600 鈩冪殑閫�鐏�婧�搴︿笅锛屽叾鍕�(sh矛)澹橀珮搴︾偤 1.21 eV锛岃�岀悊鎯冲洜瀛愬緢绌�(w臎n)瀹氾紝闅ㄨ憲閫�鐏�婧�搴︾殑鍗囬珮鐞嗘兂鍥犲瓙娌掓湁澶氬皯璁婂寲銆� J. H. Zhao 閲囩敤 N 鍨嬬⒊鍖栫�呭�栧欢锛岀敤澶氱礆(j铆)绲�(ji茅)绲傜��鎿�(ku貌)灞曟妧琛�(sh霉)鍒朵綔鍑烘搳绌块浕澹撻珮閬�(d谩)10.8 KV Ni/4H-SiC 鑲栫壒鍩轰簩妤电��锛屽�栧欢鐨勬懟闆滄績搴︾�� 5.6脳10cm锛屽帤搴︾偤115渭m锛屾�よ倴鐗瑰熀浜屾サ绠″埄鐢ㄥ�氱礆(j铆)绲�(ji茅)绲傜��鎿�(ku貌)灞曟妧琛�(sh霉)渚嗕繚璀�(h霉)鑲栫壒鍩虹祼(ji茅)閭婄罚浠ラ槻姝㈠畠鎻愬墠鎿婄┛銆�

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